PROCESS FOR PRODUCING METAL MASK
PARK, GYEONG HO, CHOI, BU YEON, JUNG, SU HONG, JANG, BYEONG SU, KWON, HYEOK JU
Year of Publication 05.06.2001
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Year of Publication 05.06.2001
Patent
APPARATUS FOR DEPOSITING ATOMIC LAYER
PARK, GYEONG HO, KIM, SANG BEOM, CHOI, BU YEON, JUNG, SU HONG, LEE, HYEONG JAE, KIM, SE HUN, AHN, CHEOL HYEON, BAE, NAM JIN, KWON, HYEOK JU
Year of Publication 02.03.2002
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Year of Publication 02.03.2002
Patent
DRY ETCH APPARATUS
PARK, GYEONG HO, CHOI, BU YEON, JUNG, SU HONG, JANG, BYEONG SU, BAE, NAM JIN, OH, GWANG SIK, KWON, HYEOK JU
Year of Publication 26.01.2002
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Year of Publication 26.01.2002
Patent