Machine learning investigation of high-k metal gate processes for dynamic random access memory peripheral transistor
Kwon, Namyong, Bang, JoonHo, Sung, Won Ju, Han, Jung Hoon, Lee, Dongin, Jung, Ilwoo, Park, Se Guen, Ban, Hyodong, Hwang, Sangjoon, Shin, Won Yong, Bae, Jinhye, Lee, Dongwoo
Published in APL materials (01.02.2024)
Published in APL materials (01.02.2024)
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Journal Article
Efficacy of low etch rate in achieving nanometer-scale smoothness of Si (100) and (110) plane surfaces using KOH and KOH/IPA solutions for optical mold applications
An, Shinmo, Lee, Seung Gol, Park, Se-Guen, Lee, El-Hang, O, Beom-Hoan
Published in Sensors and actuators. A. Physical. (01.03.2014)
Published in Sensors and actuators. A. Physical. (01.03.2014)
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Journal Article
Nanofocusing of light using three-dimensional plasmonic mode conversion
An, Shinmo, Lee, Hyun-Shik, Jeong, Yong-Beom, Jun, Young Chul, Lee, Seung Gol, Park, Se-Guen, Lee, El-Hang, Beom-Hoan, O
Published in Optics express (18.11.2013)
Published in Optics express (18.11.2013)
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Journal Article
Realization of various sub-micron metal patterns using room temperature nanoimprint lithography
Sung, Jun-Ho, Lee, Min-Woo, Lee, Seung-Gol, Park, Se-Guen, Lee, El-Hang, O, Beom-Hoan
Published in Thin solid films (23.04.2007)
Published in Thin solid films (23.04.2007)
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Journal Article
Conference Proceeding
Investigation on NBTI Control Techniques of HKMG Transistors for Low-power DRAM applications
Sung, Won Ju, Kim, Hyun Seung, Han, Jung Hoon, Park, Se Guen, Oh, Jeong-Hoon, Ban, Hyodong, Lee, Jooyoung
Published in 2023 IEEE International Reliability Physics Symposium (IRPS) (01.03.2023)
Published in 2023 IEEE International Reliability Physics Symposium (IRPS) (01.03.2023)
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Conference Proceeding
Semiconductor memory device and Method of fabricating same
PARK SE-GUEN, SONG JUNG-WOO, KIM KWANG-MIN, KANG HYUCK-JIN, KIM YONG-KWAN, LEE JUN-HO, HAN SANG-YEON
Year of Publication 04.06.2019
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Year of Publication 04.06.2019
Patent