Etchant composition with high selectivity to silicon nitride
Lee, Sok Ho, Kim, Joon Won, Song, Jung Hwan, Kim, Byeoung Tak, Han, Na, Lim, Ah Hyeon, Kang, Youngmee, Lee, Min Keun, Lee, Junwoo, Kang, Pilgu, Jo, Sung Il, Park, Hyungsoon, Lee, Suyeon, Jeon, Seong Sik
Year of Publication 23.06.2020
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Year of Publication 23.06.2020
Patent