Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films
Gebhard, M, Hellwig, M, Parala, H, Xu, K, Winter, M, Devi, A
Published in Dalton transactions : an international journal of inorganic chemistry (21.01.2014)
Published in Dalton transactions : an international journal of inorganic chemistry (21.01.2014)
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Confinement of CdSe Nanoparticles Inside MCM-41
Parala, H., Winkler, H., Kolbe, M., Wohlfart, A., Fischer, R. A., Schmechel, R., von Seggern, H.
Published in Advanced materials (Weinheim) (19.07.2000)
Published in Advanced materials (Weinheim) (19.07.2000)
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MOCVD of tantalum nitride thin films from TBTEMT single source precursor as metal electrodes in CMOS applications
Lemberger, M., Thiemann, S., Baunemann, A., Parala, H., Fischer, R.A., Hinz, J., Bauer, A.J., Ryssel, H.
Published in Surface & coatings technology (25.09.2007)
Published in Surface & coatings technology (25.09.2007)
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Conference Proceeding
MOCVD of TaN Using the All-Nitrogen-Coordinated Precursors [Ta(NEtMe)3(N-tBu)], [Ta(NEtMe)(N-tBu){C(N-iPr)2(NEtMe)}2], and [Ta(NMeEt)2(N-tBu){Me2N-N(SiMe3)}]
Baunemann, A., Lemberger, M., Bauer, A. J., Parala, H., Fischer, R. A.
Published in Chemical vapor deposition (01.03.2007)
Published in Chemical vapor deposition (01.03.2007)
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Metal-Organic CVD of Conductive and Crystalline Hafnium Nitride Films
Kim, Y., Baunemann, A., Parala, H., Devi, A., Fischer, R. A.
Published in Chemical vapor deposition (01.07.2005)
Published in Chemical vapor deposition (01.07.2005)
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Rare-Earth Based Oxide and Nitride Thin Films Employing Volatile Homoleptic Guanidinate Precursors
Milanov, Andrian P., Thiede, Tobias, Hellwig, Malte, Parala, Harish, Bock, Claudia, Becker, Hans-Werner, Ngwashi, Divine, Cross, Richard, Paul, Shashi, Kunze, Ulrich, Fischer, Roland, Devi, Anjana
Published in ECS transactions (01.01.2009)
Published in ECS transactions (01.01.2009)
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Journal Article
Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In 2 O 3 thin films
Gebhard, M., Hellwig, M., Parala, H., Xu, K., Winter, M., Devi, A.
Published in Dalton transactions : an international journal of inorganic chemistry (2014)
Published in Dalton transactions : an international journal of inorganic chemistry (2014)
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Journal Article
Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin filmsElectronic supplementary information (ESI) available: For crystal data see ESI Tables 1 and 2. Experimental details and illustrations of Isothermal TG studies, decomposition NMR studies, AFM, UV/Vis and XPS analysis. CCDC 819611 for 1 and 831071 for 2. For ESI and crystallographic data in CIF or other electronic format see DOI: 10.1039/c3dt52746h
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Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In sub(2)O sub(3) thin films
Gebhard, M, Hellwig, M, Parala, H, Xu, K, Winter, M, Devi, A
Published in Dalton transactions : an international journal of inorganic chemistry (01.12.2013)
Published in Dalton transactions : an international journal of inorganic chemistry (01.12.2013)
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MOCVD-Loading of Mesoporous Siliceous Matrices with Cu/ZnO: Supported Catalysts for Methanol Synthesis
Becker, Ralf, Parala, Harish, Hipler, Frank, Tkachenko, Olga P., Klementiev, Konstantin V., Grünert, Wolfgang, Wilmer, Hagen, Hinrichsen, Olaf, Muhler, Martin, Birkner, Alexander, Wöll, Christof, Schäfer, Sven, Fischer, Roland A.
Published in Angewandte Chemie International Edition (17.05.2004)
Published in Angewandte Chemie International Edition (17.05.2004)
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Investigations on InN whiskers grown by chemical vapour deposition
Parala, Harish, Devi, Anjana, Hipler, Frank, Maile, Eva, Birkner, Alexander, Becker, Hans W., Fischer, Roland A.
Published in Journal of crystal growth (01.09.2001)
Published in Journal of crystal growth (01.09.2001)
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Evaluation of MOCVD Grown Niobium Nitride Films as Gate Electrode for Advanced CMOS Technology
Thiede, Tobias, Parala, Harish, Reuter, Knud, Passing, Gerd, Kirchmeyer, Stephan, Hinz, Jörn, Lemberger, Martin, Bauer, Anton, Fischer, Roland
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Synthesis of nano-scale TiO2 particles by a nonhydrolytic approach
PARALA, Harish, DEVI, Anjana, BHAKTA, Raghunandan, FISCHER, Roland A
Published in Journal of materials chemistry (2002)
Published in Journal of materials chemistry (2002)
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MOCVD of gallium nitride nanostructures using (N3)2Ga{(CH2)3NR2}, R = Me, Et, as a single molecule precursor: morphology control and materials characterization
KHANDERI, Jayaprakash, WOHLFART, Andreas, PARALA, Harish, DEVI, Anjana, HAMBROCK, Julia, BIRKNER, Alexander, FISCHER, Roland A
Published in Journal of materials chemistry (01.01.2003)
Published in Journal of materials chemistry (01.01.2003)
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Journal Article
MOCVD‐Beladung mesoporöser Silicatmatrizen mit Cu/ZnO: neuartige Trägerkatalysatoren für die Methanolsynthese
Becker, Ralf, Parala, Harish, Hipler, Frank, Tkachenko, Olga P., Klementiev, Konstantin V., Grünert, Wolfgang, Wilmer, Hagen, Hinrichsen, Olaf, Muhler, Martin, Birkner, Alexander, Wöll, Christof, Schäfer, Sven, Fischer, Roland A.
Published in Angewandte Chemie (17.05.2004)
Published in Angewandte Chemie (17.05.2004)
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