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"Papania, A D"
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Bidirectional electromagnetic microactuator with microcoil fabricated on a single wafer: static characteristics of membrane displacements
by
Bintoro, J S
,
Papania
,
A D
,
Berthelot, Y H
,
Hesketh, P J
Published in
Journal of micromechanics and microengineering
(01.08.2005)
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Dynamic characteristics of membrane displacement of a bidirectional electromagnetic microactuator with microcoil fabricated on a single wafer
by
Sutanto, J.
,
Papania, A.D.
,
Berthelot, Y.H.
,
Hesketh, P.J.
Published in
Microelectronic engineering
(01.09.2005)
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Dynamic characteristics of membrane displacement of a bidirectional electromagnetic micro actuator with microcoil fabricated on a single wafer
by
Sutanto, J
,
Papania
,
A D
,
Berthelot, Y H
,
Hesketh, P J
Published in
Microelectronic engineering
(01.09.2005)
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