Crystallization of amorphous-Si films by flash lamp annealing
Pécz, B., Dobos, L., Panknin, D., Skorupa, W., Lioutas, C., Vouroutzis, N.
Published in Applied surface science (31.03.2005)
Published in Applied surface science (31.03.2005)
Get full text
Journal Article
p-Type doping of SiC by high dose Al implantation—problems and progress
Get full text
Journal Article
Conference Proceeding
Modelling of flash-lamp-induced crystallization of amorphous silicon thin films on glass
Smith, M., McMahon, R., Voelskow, M., Panknin, D., Skorupa, W.
Published in Journal of crystal growth (15.11.2005)
Published in Journal of crystal growth (15.11.2005)
Get full text
Journal Article
On the nature of ion implantation induced dislocation loops in 4H-silicon carbide
Persson, P. O. Å., Hultman, L., Janson, M. S., Hallén, A., Yakimova, R., Panknin, D., Skorupa, W.
Published in Journal of applied physics (01.09.2002)
Published in Journal of applied physics (01.09.2002)
Get full text
Journal Article
Electrical and microstructural properties of highly boron-implantation doped 6H–SiC
Panknin, D., Wirth, H., Mücklich, A., Skorupa, W.
Published in Journal of applied physics (15.03.2001)
Published in Journal of applied physics (15.03.2001)
Get full text
Journal Article
Advanced thermal processing of semiconductor materials in the millisecond range
Skorupa, W., Anwand, W., Panknin, D., Voelskow, M., Yankov, R.A., Gebel, T.
Published in Vacuum (30.05.2005)
Published in Vacuum (30.05.2005)
Get full text
Journal Article
Optical investigations of β-FeSi2 with and without Cr addition
Rebien, M., Henrion, W., Stauss, P., Diesner, K., Panknin, D.
Published in Journal of applied physics (15.11.2001)
Published in Journal of applied physics (15.11.2001)
Get full text
Journal Article
Improved 3C-SiC films epitaxially grown on Si by flash lamp processing
STOEMENOS, J, PANKNIN, D, EICKHOFF, M, HEERA, V, SKORUPA, W
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
Get full text
Journal Article
The beneficial role of flash lamp annealing on the epitaxial growth of the 3C–SiC on Si
Panknin, D., Stoemenos, J., Eickhoff, M., Heera, V., Voelskow, M., Skorupa, W.
Published in Applied surface science (12.12.2001)
Published in Applied surface science (12.12.2001)
Get full text
Journal Article
Conference Proceeding
Spreading resistance measurements on nanocrystalline SiC produced by ion beam induced crystallisation
Madhusoodanan, K.N., Heera, V., Panknin, D., Skorupa, W.
Published in Applied surface science (12.12.2001)
Published in Applied surface science (12.12.2001)
Get full text
Journal Article
Conference Proceeding
High-energy ion-implantation-induced gettering of copper in silicon beyond the projected ion range: The trans-projected-range effect
Gueorguiev, Y. M., Kögler, R., Peeva, A., Mücklich, A., Panknin, D., Yankov, R. A., Skorupa, W.
Published in Journal of applied physics (15.11.2000)
Published in Journal of applied physics (15.11.2000)
Get full text
Journal Article
Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H–SiC
Panknin, D, Wirth, H, Mücklich, A, Skorupa, W
Published in Materials science & engineering. B, Solid-state materials for advanced technology (30.07.1999)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (30.07.1999)
Get full text
Journal Article
Conference Proceeding
Ion beam synthesis of n-type doped SiC layers
Serre, C., Panknin, D., Pérez-Rodrı́guez, A., Romano-Rodrı́guez, A., Morante, J.R., Kögler, R., Skorupa, W., Esteve, J., Acero, M.C.
Published in Applied surface science (12.12.2001)
Published in Applied surface science (12.12.2001)
Get full text
Journal Article
Conference Proceeding
Liquid metal ion source-produced germanium ions for maskless ion implantation
Ganetsos, Th, Aidinis, C, Bischoff, L, Mair, G L R, Teichert, J, Panknin, D, Papadopoulos, I
Published in Journal of physics. D, Applied physics (07.02.2001)
Published in Journal of physics. D, Applied physics (07.02.2001)
Get full text
Journal Article
Trans-projected-range gettering of copper in high-energy ion-implanted silicon
Gueorguiev, Y. M., Kögler, R., Peeva, A., Mücklich, A., Panknin, D., Yankov, R. A., Skorupa, W.
Published in Journal of applied physics (01.12.2000)
Published in Journal of applied physics (01.12.2000)
Get full text
Journal Article
Buried (Fe 1-x Co x )Si 2 layers with variable band gap formed by ion beam synthesis
Panknin, D., Wieser, E., Skorupa, W., Henrion, W., Lange, H.
Published in Applied physics. A, Materials science & processing (01.02.1996)
Published in Applied physics. A, Materials science & processing (01.02.1996)
Get full text
Journal Article
Electrical and optical properties of thin Fe1-xCoxSi2 films
TEICHERT, S, KILPER, R, FRANKE, T, ERBEN, J, HÄUSSLER, P, HENRION, W, LANGE, H, PANKNIN, D
Published in Applied surface science (01.10.1995)
Published in Applied surface science (01.10.1995)
Get full text
Conference Proceeding
Journal Article
Trans-projected-range effect in proximity gettering of impurities in silicon
Gueorguiev, Y.M, Kögler, R, Peeva, A, Panknin, D, Mücklich, A, Yankov, R.A, Skorupa, W
Published in Vacuum (15.06.2001)
Published in Vacuum (15.06.2001)
Get full text
Journal Article
Conference Proceeding
Buried (Fe1-xCox)Si2 layers with variable band gap formed by ion beam synthesis
PANKNIN, D, WIESER, E, SKORUPA, W, HENRION, W, LANGE, H
Published in Applied physics. A, Materials science & processing (01.02.1996)
Published in Applied physics. A, Materials science & processing (01.02.1996)
Get full text
Journal Article
Writing implantation with a high current density focused ion beam
Bischoff, L., Hesse, E., Panknin, D., Skorupa, W., Teichert, J.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
Get full text
Journal Article