Supervised Aggregative Feature Extraction for Big Data Time Series Regression
Susto, Gian Antonio, Schirru, Andrea, Pampuri, Simone, McLoone, Sean
Published in IEEE transactions on industrial informatics (01.06.2016)
Published in IEEE transactions on industrial informatics (01.06.2016)
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Journal Article
A sampling decision system for semiconductor manufacturing - relying on virtual metrology and actual measurements
Kurz, Daniel, Pilz, Jurgen, Schirru, Andrea, Pampuri, Simone, De Luca, Cristina
Published in Proceedings of the Winter Simulation Conference 2014 (01.12.2014)
Published in Proceedings of the Winter Simulation Conference 2014 (01.12.2014)
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Conference Proceeding
A predictive maintenance system based on regularization methods for ion-implantation
Susto, G. A., Schirru, A., Pampuri, S., Beghi, A.
Published in 2012 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2012)
Published in 2012 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2012)
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Conference Proceeding
Prediction of integral type failures in semiconductor manufacturing through classification methods
Susto, Gian Antonio, McLoone, Sean, Pagano, Daniele, Schirru, Andrea, Pampuri, Simone, Beghi, Alessandro
Published in 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation (ETFA) (01.09.2013)
Published in 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation (ETFA) (01.09.2013)
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Conference Proceeding
A Fraud Detection Decision Support System via Human On-Line Behavior Characterization and Machine Learning
Susto, Gian Antonio, Terzi, Matteo, Masiero, Chiara, Pampuri, Simone, Schirru, Andrea
Published in 2018 First International Conference on Artificial Intelligence for Industries (AI4I) (01.09.2018)
Published in 2018 First International Conference on Artificial Intelligence for Industries (AI4I) (01.09.2018)
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Conference Proceeding
Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing
Pampuri, Simone, Schirru, A., Fazio, G., De Nicolao, G.
Published in 2011 IEEE International Conference on Automation Science and Engineering (01.08.2011)
Published in 2011 IEEE International Conference on Automation Science and Engineering (01.08.2011)
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Conference Proceeding
Multilevel Kernel Methods for Virtual Metrology in Semiconductor Manufacturing
Schirru, Andrea, Pampuri, Simone, De Luca, Cristina, De Nicolao, Giuseppe
Published in IFAC Proceedings Volumes (01.01.2011)
Published in IFAC Proceedings Volumes (01.01.2011)
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Journal Article
Learning from time series: Supervised Aggregative Feature Extraction
Schirru, A., Susto, G. A., Pampuri, S., McLoone, S.
Published in 2012 IEEE 51st IEEE Conference on Decision and Control (CDC) (01.12.2012)
Published in 2012 IEEE 51st IEEE Conference on Decision and Control (CDC) (01.12.2012)
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Conference Proceeding
Insight extraction for semiconductor manufacturing processes
Pampuri, Simone, Susto, Gian Antonio, Jian Wan, Johnston, Adrian, O'Hara, Paul, McLoone, Sean
Published in 2014 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2014)
Published in 2014 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2014)
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Conference Proceeding
An adaptive machine learning decision system for flexible predictive maintenance
Susto, Gian Antonio, Wan, Jian, Pampuri, Simone, Zanon, Mattia, Johnston, Adrian B., O'Hara, Paul G., McLoone, Sean
Published in 2014 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2014)
Published in 2014 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2014)
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Conference Proceeding
A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation
Susto, Gian Antonio, Schirru, Andrea, Pampuri, Simone, Pagano, Daniele, McLoone, Sean, Beghi, Alessandro
Published in 2013 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2013)
Published in 2013 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2013)
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Conference Proceeding
On Regression Methods for Virtual Metrology in Semiconductor Manufacturing
Jian Wan, Pampuri, S, O'Hara, P.G, Johnston, A.B, McLoone, S
Published in 25th IET Irish Signals & Systems Conference 2014 and 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014) (2014)
Published in 25th IET Irish Signals & Systems Conference 2014 and 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014) (2014)
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Conference Proceeding
Efficient Marginal Likelihood Computation for Gaussian Process Regression
Schirru, Andrea, Pampuri, Simone, De Nicolao, Giuseppe, McLoone, Sean
Year of Publication 29.10.2011
Year of Publication 29.10.2011
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Journal Article
An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control
Susto, G. A., Schirru, A., Pampuri, S., De Nicolao, G., Beghi, A.
Published in 2012 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2012)
Published in 2012 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2012)
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Conference Proceeding
Multistep virtual metrology approaches for semiconductor manufacturing processes
Pampuri, S., Schirru, A., Susto, G. A., De Luca, C., Beghi, A., De Nicolao, G.
Published in 2012 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2012)
Published in 2012 IEEE International Conference on Automation Science and Engineering (CASE) (01.08.2012)
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Conference Proceeding