Contact Chains for FinFET Technology Characterization
Brozek, Tomasz, Lam, Stephen, Yu, Shia, Pak, Mike K., Liu, Tom, Vallishayee, Rakesh, Yokoyama, Nobuharu
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
Get full text
Journal Article
Gated contact chains for process characterization in FinFET technologies
Brozek, Tomasz, Lam, Stephen, Shia Yu, Pak, Mike, Liu, Tom, Valishayee, Rakesh, Yokoyama, Nobuharu
Published in 2014 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2014)
Published in 2014 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2014)
Get full text
Conference Proceeding
TEST STRUCTURES FOR MEASURING SILICON THICKNESS IN FULLY DEPLETED SILICON-ON-INSULATOR TECHNOLOGIES
Brozek Thomas, Pak Mike Kyu Hyon, Lunenborg Meindert Martin, Yu Yuan, Saxena Sharad
Year of Publication 26.10.2017
Get full text
Year of Publication 26.10.2017
Patent
Bistable diodes grown by silicon molecular beam epitaxy
Zhu, Xuegen, Zheng, Xinyu, Pak, Mike, Tanner, Martin O, Wang, Kang L
Published in Thin solid films (26.05.1998)
Published in Thin solid films (26.05.1998)
Get full text
Journal Article
Conference Proceeding