Exploring the limits of high temperature thermal processing for advanced 8-inch power technology manufacturing
Rupp, T., Dyroff, N., Gaertner, T., Gross, T., Gruber, H., Neidhart, T., Peri, H., Riss, J., Schagerl, G., Stefaner, A., Sorschag, K., Danzfuss, B., Domes, H., Gatterbauer, J., Geiger, H., Kaspar, J., Komposch, A., Leicht, M., Mayer, B., Muehlbacher, K.H., Pairitsch, H., Rogge, W., Simmnacher, B., Steinacher, S., Trieblnig, E., Wald, G., Weber, K., Wiebauer, W., Wiesinger, K., Henoeckl, A.
Published in 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) (2004)
Published in 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) (2004)
Get full text
Conference Proceeding