Intrinsic and stress-induced traps in the direct tunneling current of 2.3-3.8 nm oxides and unified characterization methodologies of sub-3 nm oxides
Liu, C.T., Ghetti, A., Ma, Y., Alers, G., Chang, C.P., Cheung, K.P., Colonell, J.I., Lai, W.Y.C., Pai, C.S., Liu, R., Vaidya, H., Clemens, J.T.
Published in International Electron Devices Meeting. IEDM Technical Digest (1997)
Published in International Electron Devices Meeting. IEDM Technical Digest (1997)
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The Vertical Replacement-Gate (VRG) MOSFET: a 50-nm vertical MOSFET with lithography-independent gate length
Hergenrother, J.M., Monroe, D., Klemens, F.P., Komblit, A., Weber, G.R., Mansfield, W.M., Baker, M.R., Baumann, F.H., Bolan, K.J., Bower, J.E., Ciampa, N.A., Cirelli, R.A., Colonell, J.I., Eaglesham, D.J., Frackoviak, J., Gossmann, H.J., Green, M.L., Hillenius, S.J., King, C.A., Kleiman, R.N., Lai, W.Y.C., Lee, J.T.-C., Liu, R.C., Maynard, H.L., Morris, M.D., Oh, S.-H., Pai, C.-S., Rafferty, C.S., Rosamilia, J.M., Sorsch, T.W., Vuong, H.-H.
Published in International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) (1999)
Published in International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) (1999)
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Multiple gate oxide thickness for 2 GHz system-on-a-chip technologies
Liu, C.T., Ma, Y., Oh, M., Diodato, P.W., Stiles, K.R., Mcmacken, J.R., Li, F., Chang, C.P., Cheung, K.P., Colonell, J.I., Lai, W.Y.C., Liu, R., Lloyd, E.J., Miner, J.F., Pai, C.S., Vaidya, H., Frackoviak, J., Timko, A., Klemens, F., Maynard, H., Clemens, J.T.
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
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Dielectric materials for advanced VLSI and ULSI technologies
Obeng, Yaw S., Steiner, Kurt G., Velaga, Ankineedu N., Pal, Chien-Shing
Published in AT&T Technical Journal (01.05.1994)
Published in AT&T Technical Journal (01.05.1994)
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Journal Article
Integrated W-silicide metal resistor for advanced CMOS technologies
Pai, C.S., Bude, M.K., Frei, M., Rogers, S.N., Jacobson, D.C., Merchant, S.M., Hui, F., Liu, R., Gregor, R.W.
Published in Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) (2001)
Published in Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) (2001)
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Fringe-field-activated SOI tilting mirrors
Greywall, D.S., Chien-Shing Pai, Sang-Hyun Oh, Chorng-Ping Chang, Marom, D.M., Stanton, S., Busch, P.A., Cirelli, R.A., Taylor, J.A., Klemens, F.P., Sorsch, T.W., Bower, J.E., Lai, W.Y.-C., Soh, H.T.
Published in 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) (2003)
Published in 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) (2003)
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