Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process
Baik, Seunghun, Kwon, Hyeokjin, Paeng, Chuck, Zhang, He, Kalkofen, Bodo, Jang, Jae Eun, Kim, Y. S., Kwon, Hyuk-Jun
Published in IEEE electron device letters (01.09.2019)
Published in IEEE electron device letters (01.09.2019)
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Journal Article
Sb co-Doping to Enhance Phosphorous Level on Ge Using Ion Decoupled Plasma Process
Paeng, Chuck, Zhang, He, Kim, Y. S.
Published in 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO) (01.07.2018)
Published in 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO) (01.07.2018)
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Conference Proceeding
Enhancing phosphorous doping level on Ge by Sb co-doping with non-beamline implantation methods
Paeng, Chuck, Zhang, He, Kalkofen, Bodo, Kim, Y S
Published in 2018 18th International Workshop on Junction Technology (IWJT) (01.03.2018)
Published in 2018 18th International Workshop on Junction Technology (IWJT) (01.03.2018)
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Conference Proceeding