Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile
Yim, Jihong, Verkama, Emma, Velasco, Jorge A, Arts, Karsten, Puurunen, Riikka L
Published in Physical chemistry chemical physics : PCCP (13.04.2022)
Published in Physical chemistry chemical physics : PCCP (13.04.2022)
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Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
Arts, Karsten, Thepass, Harvey, Verheijen, Marcel A, Puurunen, Riikka L, Kessels, Wilhelmus M. M, Knoops, Harm C. M
Published in Chemistry of materials (13.07.2021)
Published in Chemistry of materials (13.07.2021)
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Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
Arts, Karsten, Utriainen, Mikko, Puurunen, Riikka L, Kessels, Wilhelmus M. M, Knoops, Harm C. M
Published in Journal of physical chemistry. C (07.11.2019)
Published in Journal of physical chemistry. C (07.11.2019)
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Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion-reaction model and a ballistic transport-reaction model
Järvilehto, Jänis, Velasco, Jorge A, Yim, Jihong, Gonsalves, Christine, Puurunen, Riikka L
Published in Physical chemistry chemical physics : PCCP (30.08.2023)
Published in Physical chemistry chemical physics : PCCP (30.08.2023)
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Hydrodeoxygenation and hydrodenitrogenation of n -hexadecanamide over Pt catalysts: effect of the support
Verkama, Emma, Albersberger, Sylvia, Arandia, Aitor, Meinander, Kristoffer, Tiitta, Marja, Karinen, Reetta, Puurunen, Riikka L.
Published in Catalysis science & technology (22.01.2024)
Published in Catalysis science & technology (22.01.2024)
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Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Ylivaara, Oili M.E., Liu, Xuwen, Kilpi, Lauri, Lyytinen, Jussi, Schneider, Dieter, Laitinen, Mikko, Julin, Jaakko, Ali, Saima, Sintonen, Sakari, Berdova, Maria, Haimi, Eero, Sajavaara, Timo, Ronkainen, Helena, Lipsanen, Harri, Koskinen, Jari, Hannula, Simo-Pekka, Puurunen, Riikka L.
Published in Thin solid films (03.02.2014)
Published in Thin solid films (03.02.2014)
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Competitive Hydrodeoxygenation and Hydrodenitrogenation Reactions in the Hydrotreatment of Fatty Acid and Amine Mixtures
Verkama, Emma, Auvinen, Paavo, Albersberger, Sylvia, Tiitta, Marja, Karinen, Reetta, Puurunen, Riikka L.
Published in Topics in catalysis (01.10.2023)
Published in Topics in catalysis (01.10.2023)
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Structured microreactor with gold and palladium on titania: Active, regenerable and durable catalyst coatings for the gas-phase partial oxidation of 1-butanol
Khan, Yaseen, Marin, Minna, Viinikainen, Tiia, Lehtonen, Juha, Puurunen, Riikka L., Karinen, Reetta
Published in Applied catalysis. A, General (25.07.2018)
Published in Applied catalysis. A, General (25.07.2018)
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Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels
Yim, Jihong, Ylivaara, Oili M. E, Ylilammi, Markku, Korpelainen, Virpi, Haimi, Eero, Verkama, Emma, Utriainen, Mikko, Puurunen, Riikka L
Published in Physical chemistry chemical physics : PCCP (21.10.2020)
Published in Physical chemistry chemical physics : PCCP (21.10.2020)
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Aqueous-phase reforming of Fischer-Tropsch alcohols over nickel-based catalysts to produce hydrogen: Product distribution and reaction pathways
Coronado, Irene, Pitínová, Martina, Karinen, Reetta, Reinikainen, Matti, Puurunen, Riikka L., Lehtonen, Juha
Published in Applied catalysis. A, General (25.10.2018)
Published in Applied catalysis. A, General (25.10.2018)
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Hydrodeoxygenation Model Compounds γ‑Heptalactone and γ‑Nonalactone: Density from 293 to 473 K and H2 Solubility from 479 to 582 K
González Escobedo, José Luis, Uusi-Kyyny, Petri, Puurunen, Riikka L, Alopaeus, Ville
Published in Journal of chemical and engineering data (14.05.2020)
Published in Journal of chemical and engineering data (14.05.2020)
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Study of Ni, Pt, and Ru Catalysts on Wood‐based Activated Carbon Supports and their Activity in Furfural Conversion to 2‐Methylfuran
Mäkelä, Eveliina, Lahti, Riikka, Jaatinen, Salla, Romar, Henrik, Hu, Tao, Puurunen, Riikka L., Lassi, Ulla, Karinen, Reetta
Published in ChemCatChem (13.08.2018)
Published in ChemCatChem (13.08.2018)
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Nickel Supported on Mesoporous Zirconium Oxide by Atomic Layer Deposition: Initial Fixed-Bed Reactor Study
Voigt, Pauline, Haimi, Eero, Lahtinen, Jouko, Cheah, You Wayne, Mäkelä, Eveliina, Viinikainen, Tiia, Puurunen, Riikka L.
Published in Topics in catalysis (15.08.2019)
Published in Topics in catalysis (15.08.2019)
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Journal Article
Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
Putkonen, Matti, Bosund, Markus, Ylivaara, Oili M.E., Puurunen, Riikka L., Kilpi, Lauri, Ronkainen, Helena, Sintonen, Sakari, Ali, Saima, Lipsanen, Harri, Liu, Xuwen, Haimi, Eero, Hannula, Simo-Pekka, Sajavaara, Timo, Buchanan, Iain, Karwacki, Eugene, Vähä-Nissi, Mika
Published in Thin solid films (02.05.2014)
Published in Thin solid films (02.05.2014)
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Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition
Mattinen, Miika, Hämäläinen, Jani, Gao, Feng, Jalkanen, Pasi, Mizohata, Kenichiro, Räisänen, Jyrki, Puurunen, Riikka L, Ritala, Mikko, Leskelä, Markku
Published in Langmuir (18.10.2016)
Published in Langmuir (18.10.2016)
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Liquid‐phase Hydrodeoxygenation of 4‐Propylphenol to Propylbenzene: Reducible Supports for Pt Catalysts
Mäkelä, Eveliina, González Escobedo, José Luis, Neuvonen, Jouni, Lahtinen, Jouko, Lindblad, Marina, Lassi, Ulla, Karinen, Reetta, Puurunen, Riikka L.
Published in ChemCatChem (20.08.2020)
Published in ChemCatChem (20.08.2020)
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