Progress report on high aspect ratio patterning for memory devices
Shen, Meihua, Lill, Thorsten, Hoang, John, Chi, Hao, Routzahn, Aaron, Church, Jonathan, Subramonium, Pramod, Puthenkovilakam, Ragesh, Reddy, Sirish, Bhadauriya, Sonal, Roberts, Sloan, Kamarthy, Gowri
Published in Japanese Journal of Applied Physics (01.07.2023)
Published in Japanese Journal of Applied Physics (01.07.2023)
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Journal Article
하드 마스크 선택도 (selectivity) 개선을 위한 불활성 가스 주입
PUTHENKOVILAKAM RAGESH, RIGSBY DANIELA ANJOS, ZHAO LIE, HOLLISTER ALICE G
Year of Publication 10.01.2023
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Year of Publication 10.01.2023
Patent
고 선택도 도핑된 하드마스크 막들
PUTHENKOVILAKAM RAGESH, BHADAURIYA SONAL, THOMBARE SHRUTI VIVEK, VARADARAJAN SESHASAYEE, REDDY KAPU SIRISH
Year of Publication 18.01.2024
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Year of Publication 18.01.2024
Patent
순수 화학적 수단들에 의한 비정질 탄소 하드 마스크 막의 증착 속도 향상
WEIMER MATTHEW SCOTT, PUTHENKOVILAKAM RAGESH, HSU CHIN JUI, REDDY KAPU SIRISH
Year of Publication 02.06.2023
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Year of Publication 02.06.2023
Patent
플라즈마 기반 프로세스들의 모니터링 및 제어
PUTHENKOVILAKAM RAGESH, SCHROEDER TODD, SAKIYAMA YUKINORI, MACDONALD GORDON ALEX, HSU CHIN JUI, REDDY KAPU SIRISH, UDYAVARA SAGAR BALAGANGADHARA
Year of Publication 25.03.2024
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Year of Publication 25.03.2024
Patent
부분적으로 에칭된 구조체들의 비-컨포멀 패시베이션을 위한 인-시츄 (in-situ) 하이드로카본 기반 층
PUTHENKOVILAKAM RAGESH, PRABHAKARA GOPALADASU, KUMAR PRABHAT, YUN SEOKMIN, DESHMUKH SHASHANK, ZHANG XIN, REDDY KAPU SIRISH, HUDSON ERIC
Year of Publication 16.02.2024
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Year of Publication 16.02.2024
Patent
고 전력 펄싱된 저 주파수 RF에 의한 고 선택도, 저 응력, 및 저 수소 다이아몬드-유사 탄소 하드 마스크들
WEIMER MATTHEW SCOTT, PUTHENKOVILAKAM RAGESH, FRENCH DAVID, SUBRAMONIUM PRAMOD, BAI RUJUN
Year of Publication 06.01.2022
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Year of Publication 06.01.2022
Patent
저압에서의 고밀도, 고모듈러스, 및 고경도 비정질 탄소 막들
WEIMER MATTHEW SCOTT, PUTHENKOVILAKAM RAGESH, XUE JUN, MANUMPIL MARY ANNE, ZHAO XIZHU, MACDONALD GORDON ALEX, ZHANG SHAOQING, TAN SAMANTHA S.H, HSU CHIN JUI, HUDSON ERIC A, LEE SHIH KED
Year of Publication 25.04.2022
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Year of Publication 25.04.2022
Patent
INERT GAS IMPLANTATION FOR HARD MASK SELECTIVITY IMPROVEMENT
HOLLISTER, Alice G, Zhao, Lie, PUTHENKOVILAKAM, Ragesh, RIGSBY, Daniela Anjos
Year of Publication 13.07.2023
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Year of Publication 13.07.2023
Patent
Enabling High Aspect Ratio 3D NAND Scaling through Deposition and Etch Co-Optimization (DECO)
Shen, Meihua, Hoang, John, Chi, Hao, Routzahn, Aaron, Church, Jonathan, Subramonium, Pramod Subramonium, Puthenkovilakam, Ragesh, Reddy, Sirish Reddy, Bhadauriya, Sonal, Roberts, Sloan, Lill, Thorsten, Kamarthy, Gowri
Published in Meeting abstracts (Electrochemical Society) (09.10.2022)
Published in Meeting abstracts (Electrochemical Society) (09.10.2022)
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Journal Article
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 11.07.2024
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Year of Publication 11.07.2024
Patent
CONTROLLABLE CARBON PECVD FILM DEPOSITION
ONO, Toshisato, REDDY, Kapu Sirish, MALIEKKAL, Vineet, ROBERTS, Francis Sloan, MACDONALD, Gordon Alex, PUTHENKOVILAKAM, Ragesh
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
Patent
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 25.04.2024
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Year of Publication 25.04.2024
Patent
Depositing a carbon hardmask by high power pulsed low frequency RF
Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 05.12.2023
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Year of Publication 05.12.2023
Patent
DEPOSITION RATE ENHANCEMENT OF AMORPHOUS CARBON HARD MASK FILM BY PURELY CHEMICAL MEANS
Weimer, Matthew Scott, Hsu, Chin-Jui, Puthenkovilakam, Ragesh, Reddy, Kapu Sirish
Year of Publication 09.11.2023
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Year of Publication 09.11.2023
Patent