Automatic synthesis of equipment recipes from specified wafer-state transitions
Davis, J.C., Mozumder, P.K., Burch, R., Fernando, C., Apte, P.P., Saxena, S., Rao, S., Vasanth, K.
Published in IEEE transactions on semiconductor manufacturing (01.11.1998)
Published in IEEE transactions on semiconductor manufacturing (01.11.1998)
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Journal Article
Conference Proceeding
Future Interconnect Materials and System Integration Strategies for Data-Intensive Applications
Apte, Pushkar, Ramalingam, Suresh, Gandhi, Jaspreet, Kaviani, Alireza, Mitra, Subhasish, Wong, Philip, Lee, Vincent, El-Sabry, Mohamed, Salmon, Tom, Rice, Richard, Gerber, Mark, Beica, Rozalia, Calvert, Jeff, Hemker, Dave, Dordi, Yezdi, Ranjan, Manish
Published in 2018 7th Electronic System-Integration Technology Conference (ESTC) (01.09.2018)
Published in 2018 7th Electronic System-Integration Technology Conference (ESTC) (01.09.2018)
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Conference Proceeding
Constant current stress breakdown in ultrathin SiO2 films
APTE, P. P, KUBOTA, T, SARASWAT, K. C
Published in Journal of the Electrochemical Society (01.03.1993)
Published in Journal of the Electrochemical Society (01.03.1993)
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Journal Article
Charge trap generation in LPCVD oxides under high field stressing
Bhat, N., Apte, P.P., Saraswat, K.C.
Published in IEEE transactions on electron devices (01.04.1996)
Published in IEEE transactions on electron devices (01.04.1996)
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Journal Article
Apparatus for efficiently coupling light from a light source into a thin object
APTE PUSHKAR, DESHPANDE ALOK, RAMA PRAVEEN RUBY, KHAIRNAR PARAG, KATARIYA SUMEET, KANADE UDAYAN, GANU SANAT
Year of Publication 04.03.2014
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Year of Publication 04.03.2014
Patent