광학 증폭기 시스템 내에서의 가스 혼합물 제어
BROWN DANIEL JOHN WILLIAM, VOORMA HARM JAN, PURVIS MICHAEL ANTHONY, ZHANG KEVIN WEIMIN, HOFSTRA RAMON MARK, ROKITSKI ROSTISLAV
Year of Publication 16.12.2022
Get full text
Year of Publication 16.12.2022
Patent
VARIABLE RADIUS MIRROR DICHROIC BEAM SPLITTER MODULE FOR EXTREME ULTRAVIOLET SOURCE
SCHAFGANS ALEXANDER ANTHONY, PURVIS MICHAEL ANTHONY, RAFAC ROBERT JAY, ZHANG KEVIN WEIMIN
Year of Publication 28.08.2017
Get full text
Year of Publication 28.08.2017
Patent
SYSTEM FOR MONITORING A PLASMA
Hummler, Klaus Martin, Rafac, Robert Jay, Purvis, Michael Anthony, Ding, Chengyuan, Fomenkov, Igor Vladimirovich
Year of Publication 12.05.2022
Get full text
Year of Publication 12.05.2022
Patent
System for monitoring a plasma
Hummler, Klaus Martin, Rafac, Robert Jay, Purvis, Michael Anthony, Ding, Chengyuan, Fomenkov, Igor Vladimirovich
Year of Publication 01.03.2022
Get full text
Year of Publication 01.03.2022
Patent
SYSTEM FOR MONITORING A PLASMA
Hummler, Klaus Martin, Rafac, Robert Jay, Purvis, Michael Anthony, Ding, Chengyuan, Fomenkov, Igor Vladimirovich
Year of Publication 29.10.2020
Get full text
Year of Publication 29.10.2020
Patent
SYSTEM FOR MONITORING A PLASMA
CHENGYUAN DING, MICHAEL ANTHONY PURVIS, KLAUS MARTIN HUMMLER, IGOR VLADIMIROVICH FOMENKOV, ROBERT JAY RAFAC
Year of Publication 01.05.2019
Get full text
Year of Publication 01.05.2019
Patent
Gas mixture control in optical amplifier system
VOORMA, HARM-JAN, BROWN, DANIEL JOHN WILLIAM, ROKITSKI, ROSTISLAV, HOFSTRA, RAMON MARK, ZHANG, KEVIN WEIMIN, PURVIS, MICHAEL ANTHONY
Year of Publication 16.10.2021
Get full text
Year of Publication 16.10.2021
Patent
Variable radius mirror dichroic beam splitter module for extreme ultraviolet source
SCHAFGANS ALEXANDER ANTHONY, PURVIS MICHAEL ANTHONY, RAFAC ROBERT JAY, ZHANG KEVIN WEIMIN
Year of Publication 16.02.2018
Get full text
Year of Publication 16.02.2018
Patent