Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection
Risquez, Sarah, Redolfi, Sebastian, Fleury, Clement, Wulf, Matthias, Roshanghias, Ali, Piot, Adrien, Streque, Jeremy, Schmoltner, Kerstin, Dao, Thang Duy, Puff, Markus, Moridi, Mohssen
Published in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (15.01.2023)
Published in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (15.01.2023)
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