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Method for manufacturing gate oxide capacitors including wafer backside dielectric and implantation electron flood gun current control

by SUNG; JANMYE, CHRAPACZ; TERRY, POSSANZA; WILLIAM A, PROZONIC; MICHAEL ALLEN, MOERSCHEL; KENNETH GORDON
Year of Publication 12.08.1997

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Lokaloxidierung von Silizium mit Isolierungsverfahren durch maskierte Seitenflächen

by MOERSCHEL, KENNETH GORDON, CHIU, TZU-YIN, LIU, TE-YIN MARK, ERCEG, FRANK MICHAEL, SUNG, JANMYE, PROZONIC, MICHAEL ALLEN
Year of Publication 13.01.2000

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Local oxidation of silicon with sidewall masked isolation process

by MOERSCHEL, KENNETH GORDON, CHIU, TZU-YIN, LIU, TE-YIN MARK, ERCEG, FRANK MICHAEL, SUNG, JANMYE, PROZONIC, MICHAEL ALLEN
Year of Publication 21.07.1999

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Local oxidation of silicon with sidewall masked isolation process

by MOERSCHEL, KENNETH GORDON, CHIU, TZU-YIN, LIU, TE-YIN MARK, ERCEG, FRANK MICHAEL, SUNG, JANMYE, PROZONIC, MICHAEL ALLEN
Year of Publication 13.12.1995

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Method for manufacturing gate oxide capacitors including wafer backside dielectric and implantation electron flood gun current control

Lokaloxidierung von Silizium mit Isolierungsverfahren durch maskierte Seitenflächen

Local oxidation of silicon with sidewall masked isolation process

Local oxidation of silicon with sidewall masked isolation process

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