Search Results - "PROCHNAU JENS" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

OPTICAL ELEMENT FOR THE BEAM GUIDANCE OF IMAGING LIGHT IN PROJECTION LITHOGRAPHY

OPTICAL ELEMENT FOR THE BEAM GUIDANCE OF IMAGING LIGHT IN PROJECTION LITHOGRAPHY

by Prochnau, Jens, Orlik, Roman, Schaffer, Dirk
Year of Publication 14.05.2020

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Patent

ARRANGEMENT AND LITHOGRAPHY APPARATUS WITH ARRANGEMENT

ARRANGEMENT AND LITHOGRAPHY APPARATUS WITH ARRANGEMENT

by Prochnau Jens, Nefzi Marwene
Year of Publication 28.07.2016

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Patent

OPTICAL ARRANGEMENT OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

OPTICAL ARRANGEMENT OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

by SCHAFFER, DIRK, PROCHNAU, JENS
Year of Publication 31.03.2016

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Patent

OPTICAL ELEMENT FOR THE BEAM GUIDANCE OF IMAGING LIGHT IN PROJECTION LITHOGRAPHY

OPTICAL ELEMENT FOR THE BEAM GUIDANCE OF IMAGING LIGHT IN PROJECTION LITHOGRAPHY

by PROCHNAU, Jens, SCHAFFER, Dirk, ORLIK, Roman
Year of Publication 31.01.2019

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Patent

Optical element for the beam guidance of imaging light in projection lithography

Optical element for the beam guidance of imaging light in projection lithography

by ORLIK, ROMAN, SCHAFFER, DIRK, PROCHNAU, JENS
Year of Publication 21.08.2023

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Patent

Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same

Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same

by Prochnau, Jens, Nefzi, Marwene, Schaffer, Dirk
Year of Publication 09.10.2018

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Patent

LENS ARRANGEMENT, IN PARTICULAR A SPECTACLE GLASS ARRANGEMENT AND METHOD FOR PRODUCING A LENS ARRANGEMENT

LENS ARRANGEMENT, IN PARTICULAR A SPECTACLE GLASS ARRANGEMENT AND METHOD FOR PRODUCING A LENS ARRANGEMENT

by PROCHNAU, Jens, MESCHENMOSER, Ralf, PUETZ, Joerg
Year of Publication 13.09.2018

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Patent

Optical element for the beam guidance of imaging light in projection lithography

Optical element for the beam guidance of imaging light in projection lithography

by ORLIK, ROMAN, SCHAFFER, DIRK, PROCHNAU, JENS
Year of Publication 16.07.2023

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Patent

LENS ARRANGEMENT, IN PARTICULAR A SPECTACLE GLASS ARRANGEMENT AND METHOD FOR PRODUCING A LENS ARRANGEMENT

LENS ARRANGEMENT, IN PARTICULAR A SPECTACLE GLASS ARRANGEMENT AND METHOD FOR PRODUCING A LENS ARRANGEMENT

by PROCHNAU, Jens, MESCHENMOSER, Ralf, PUETZ, Joerg
Year of Publication 18.07.2018

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Patent

Optical arrangement of a microlithographic projection exposure apparatus

Optical arrangement of a microlithographic projection exposure apparatus

by SCHAFFER, DIRK, PROCHNAU, JENS
Year of Publication 01.02.2020

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Patent

MOVEABLY MOUNTED COMPONENT OF PROJECTION EXPOSURE SYSTEM, AS WELL AS DEVICE AND METHOD FOR MOVEMENT LIMITATION FOR SAME

MOVEABLY MOUNTED COMPONENT OF PROJECTION EXPOSURE SYSTEM, AS WELL AS DEVICE AND METHOD FOR MOVEMENT LIMITATION FOR SAME

by Prochnau Jens, Nefzi Marwene, Schaffer Dirk
Year of Publication 14.12.2017

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Patent

Optisches Element zur Strahlführung von Abbildungslicht bei der Projektionslithographie

Optisches Element zur Strahlführung von Abbildungslicht bei der Projektionslithographie

by Prochnau, Jens, Schaffer, Dirk
Year of Publication 11.07.2019

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Patent

Optical imaging arrangement with simplified manufacture

Optical imaging arrangement with simplified manufacture

by Kugler Jens, Prochnau Jens, Xalter Stefan
Year of Publication 31.10.2017

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Patent

Optisches Element zur Strahlführung von Abbildungslicht bei der Projektionslithographie

Optisches Element zur Strahlführung von Abbildungslicht bei der Projektionslithographie

by Prochnau, Jens, Schaffer, Dirk
Year of Publication 31.01.2019

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Patent

Linsenanordnung, insbesondere Brillenglasanordnung, Anzeigevorrichtung und Verfahren zum Herstellen einer Linsenanordnung

Linsenanordnung, insbesondere Brillenglasanordnung, Anzeigevorrichtung und Verfahren zum Herstellen einer Linsenanordnung

by Pütz, Jörg, Prochnau, Jens, Meschenmoser, Ralf
Year of Publication 12.05.2022

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Patent

MOUNTING ARRANGEMENT FOR OPTICAL IMAGING ARRANGEMENT

MOUNTING ARRANGEMENT FOR OPTICAL IMAGING ARRANGEMENT

by SCHAFFER DIRK, PROCHNAU JENS
Year of Publication 04.01.2019

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Patent

Optical arrangement, in particular lithography system, with a transport lock

Optical arrangement, in particular lithography system, with a transport lock

by Fritzsche, Steffen, Kulitzki, Viktor, Wagner, Hendrik, Erath, Michael, Nefzi, Marwène, Prochnau, Jens, Ahles, Florian, Zweering, Ralf
Year of Publication 01.09.2020

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Patent

VORRICHTUNG ZUR LAGERUNG VON OPTISCHEN ELEMENTEN UND OPTISCHE ANORDNUNG MIT ENTSPRECHENDER VORRICHTUNG

VORRICHTUNG ZUR LAGERUNG VON OPTISCHEN ELEMENTEN UND OPTISCHE ANORDNUNG MIT ENTSPRECHENDER VORRICHTUNG

by Prochnau, Jens, Schaffer, Dirk
Year of Publication 05.07.2018

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Patent

OPTICAL COMPONENT AND METHOD FOR THE PRODUCTION OF SAME

OPTICAL COMPONENT AND METHOD FOR THE PRODUCTION OF SAME

by PUTZ JORG, PROCHNAU JENS
Year of Publication 11.05.2018

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Patent

Projektionsbelichtungsanlage mit deformationsentkoppelten Komponenten

Projektionsbelichtungsanlage mit deformationsentkoppelten Komponenten

by Prochnau, Jens, Schaffer, Dirk
Year of Publication 03.05.2018

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Patent

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