LINER AND BARRIER APPLICATIONS FOR SUBTRACTIVE METAL INTEGRATION
Shen, Meihua, Sharma, Prithu, Knisley, Thomas Joseph, Wu, Hui-Jung, Hoang, John, Shankar, Nagraj
Year of Publication 26.07.2018
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Year of Publication 26.07.2018
Patent
Controlling Epitaxial GaAsP/SiGe Heterovalent Interfaces
Sharma, Prithu, Milakovich, Timothy, Bulsara, Mayank, Fitzgerald, Eugene A.
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
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Journal Article
Liner and barrier applications for subtractive metal integration
Wu Hui-Jung, Hoang John, Sharma Prithu, Shen Meihua, Shankar Nagraj, Knisley Thomas Joseph
Year of Publication 20.02.2018
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Year of Publication 20.02.2018
Patent
Hybrid substrate processing
Sharma, Prithu, Kangude, Abhijit A, Posner, Bryan W, Bir, Karan, Jinasundera, Sudirukkuge T, Gupta, Nathan K, Lancaster-Larocque, Simon R, Cheng, Weibo
Year of Publication 28.05.2019
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Year of Publication 28.05.2019
Patent
Method to etch copper barrier film
Zhu Ji, Hoang John, Huang Shuogang, Sharma Prithu, Shen Meihua, Zhou Baosuo, Lill Thorsten
Year of Publication 14.02.2017
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Year of Publication 14.02.2017
Patent
NOVEL METHOD TO ETCH COPPER BARRIER FILM
HUANG SHUOGANG, HOANG JOHN, ZHOU BAOSUO, LILL THORSTEN, SHEN MEIHUA, ZHU JI, SHARMA PRITHU
Year of Publication 14.04.2016
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Year of Publication 14.04.2016
Patent
HYBRID SUBSTRATE PROCESSING
Gupta Nathan K, Jinasundera Sudirukkuge T, Cheng Weibo, Sharma Prithu, Bir Karan, Posner Bryan W, Kangude Abhijit A, Lancaster-Larocque Simon R
Year of Publication 29.03.2018
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Year of Publication 29.03.2018
Patent
Liner and barrier applications for subtractive metal integration
KNISLEY, THOMAS JOSEPH, WU, HUI-JUNG, SHANKAR, NAGRAJ, SHEN, MEIHUA, SHARMA, PRITHU, HOANG, JOHN
Year of Publication 06.01.2016
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Year of Publication 06.01.2016
Patent
LINER AND BARRIER APPLICATIONS FOR SUBTRACTIVE METAL INTEGRATION
HOANG JOHN, SHANKAR NAGRAJ, KNISLEY THOMAS JOSEPH, WU HUI-JUNG, SHEN MEIHUA, SHARMA PRITHU
Year of Publication 31.12.2015
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Year of Publication 31.12.2015
Patent
Electronic device display vias
Vosgueritchian Michael, Jinasundera Sudirukkuge T, Xu Tingjun, McClure Stephen R, Gehlen Elmar, Wright Derek W, Sharma Prithu, Kim Soyoung, Wen Xiaonan, Pedder James E, Lin Wei
Year of Publication 28.11.2017
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Year of Publication 28.11.2017
Patent
Method to etch non-volatile metal materials
YANG WENBING, LILL THORSTEN, SINGH HARMEET, JANEK RICHARD P, SHEN MEIHUA, TAN SAMANTHA S. H, SHARMA PRITHU, MARKS JEFFREY
Year of Publication 12.07.2016
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Year of Publication 12.07.2016
Patent
Materials Integration for III-V/SiGe+CMOS Integrated Circuit Platforms (Invited)
Fitzgerald, Eugene A., Sharma, Prithu, Bulsara, Mayank, Milakovich, Timothy, Ringel, Steven, Pitera, Arthur, Hennessy, John, Malonis, Andrew
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
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Journal Article
Novel method to etch copper barrier film
ZHU, JI, HUANG, SHUOGANG, ZHOU, BAOSUO, SHEN, MEIHUA, LILL, THORSTEN, SHARMA, PRITHU, HOANG, JOHN
Year of Publication 11.04.2020
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Year of Publication 11.04.2020
Patent
METHOD TO ETCH NON-VOLATILE METAL MATERIALS
YANG WENBING, LILL THORSTEN, SINGH HARMEET, JANEK RICHARD P, SHEN MEIHUA, TAN SAMANTHA S.H, SHARMA PRITHU, MARKS JEFFREY
Year of Publication 26.11.2015
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Year of Publication 26.11.2015
Patent
METHOD TO ETCH NON-VOLATILE METAL MATERIALS
MARKS, JEFFREY, YANG, WENBING, SINGH, HARMEET, SHEN, MEIHUA, TAN, SAMANTHA S.H, LILL, THORSTEN, JANEK, RICHARD P, SHARMA, PRITHU
Year of Publication 29.10.2015
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Year of Publication 29.10.2015
Patent
METHOD TO ETCH NON-VOLATILE METAL MATERIALS
YANG WENBING, LILL THORSTEN, SINGH HARMEET, JANEK RICHARD P, SHEN MEIHUA, TAN SAMANTHA S.H, SHARMA PRITHU, MARKS JEFFREY
Year of Publication 01.10.2015
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Year of Publication 01.10.2015
Patent
Method to etch non-volatile metal materials
YANG WENBING, LILL THORSTEN, SINGH HARMEET, JANEK RICHARD P, SHEN MEIHUA, TAN SAMANTHA S. H, SHARMA PRITHU, MARKS JEFFREY
Year of Publication 30.09.2015
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Year of Publication 30.09.2015
Patent