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Year of Publication 04.06.2020
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Year of Publication 31.07.2017
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A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm
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Published in IEEE transactions on instrumentation and measurement (01.12.2001)
Published in IEEE transactions on instrumentation and measurement (01.12.2001)
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Year of Publication 11.01.2024
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Interferometric stage positioning apparatus
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Year of Publication 18.10.2022
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INTERFEROMETRIC STAGE POSITIONING APPARATUS
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Year of Publication 23.07.2020
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Year of Publication 23.07.2020
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APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
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Year of Publication 29.06.2023
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Year of Publication 29.06.2023
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APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
GOSEN, Jeroen, VAN GEND, Johan, DE VOS, Youssef, VAN DE GROES, Henricus, PRIL, Wouter, VAN BANNING, Dennis, ARORA, Sampann, KUINDERSMA, Lucas, KEULEN, Luuc, KOOIKER, Allard, RONDE, Michaël
Year of Publication 16.12.2021
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Year of Publication 16.12.2021
Patent
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
VAN GEND, Johan, PRIL, Wouter, Onno, GOSEN, Jeroen, Gerard, DE VOS, Youssef, Karel, Maria, VAN DE GROES, Henricus, Martinus, Johannes, VAN BANNING, Dennis, Herman, Caspar, ARORA, Sampann, RONDE, Michaël, Johannes, Christiaan, KUINDERSMA, Lucas, KEULEN, Luuc, KOOIKER, Allard, Eelco
Year of Publication 15.12.2021
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Year of Publication 15.12.2021
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ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS
COSIJNS Suzanne Johanna, Antonetta, TONG-MINH Bryan, PRIL Wouter Onno, KOOIKER Allard Eelco, BAARTMAN Jan Peter
Year of Publication 30.11.2017
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Year of Publication 30.11.2017
Patent