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Year of Publication 24.07.2013
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Year of Publication 18.11.2009
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Year of Publication 18.11.2009
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VACUUM COATING APPARATUS
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Year of Publication 11.11.2009
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VACUUM COATING APPARATUS
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Year of Publication 12.09.2008
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Year of Publication 12.09.2008
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INLINE VACUUM PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATES THEREIN
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Year of Publication 04.09.2008
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Year of Publication 04.09.2008
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Vacuum coating apparatus
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Year of Publication 03.09.2014
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Year of Publication 03.09.2014
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Inline vacuum processing apparatus and method for processing substrates therein
POPPELLER, MARKUS, KUHN, HANSJOERG, ZINDEL, ARNO, KERSCHBAUMER, JOERG, ZIMIN, DMITRY
Year of Publication 01.02.2014
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Year of Publication 01.02.2014
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METHOD FOR PRODUCING SEMI-CONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD
POPPELLER MARKUS, BALLUTAUD JULIETTE, HOWLING ALAN, KROLL ULRICH, SCHMITT JACQUES, BUCHER CEDRIC, HOLLENSTEIN CHRISTOPH
Year of Publication 21.05.2009
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Year of Publication 21.05.2009
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