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Year of Publication 05.03.2019
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Year of Publication 05.03.2019
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스퍼터링 샤워헤드
PONNEKANTI HARI K, GOPALRAJA PRABURAM, SUBRAMANI ANANTHA K, GUNG TZA JING
Year of Publication 22.02.2019
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Year of Publication 22.02.2019
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반도체 프로세스 장비
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Year of Publication 20.09.2017
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Year of Publication 20.09.2017
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QUAD CHAMBER AND PLATFORM HAVING MULTIPLE QUAD CHAMBERS
PONNEKANTI HARI K, ROCHA ALVAREZ JUAN CARLOS, JANAKIRAMAN KARTHIK, SRINIVASAN MUKUND
Year of Publication 10.07.2017
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Year of Publication 10.07.2017
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프로세스 툴에서의 온-보드 메트롤로지(OBM) 설계 및 그 영향
PAUL KHOKAN C, PONNEKANTI HARI K, ROCHA ALVAREZ JUAN CARLOS, CHOUDHURY RUPANKAR, PINSON JAY D. II, ATHANI SHEKHAR, KUMPALA SANDEEP, PANAVALAPPIL KUMARANKUTTY HANISH KUMAR
Year of Publication 04.07.2018
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Year of Publication 04.07.2018
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WAFER SWAPPER
PONNEKANTI HARI K, ROCHA ALVAREZ JUAN CARLOS, DU BOIS DALE R, BALUJA SANJEEV, WILTON PRAJEETH, JANAKIRAMAN KARTHIK
Year of Publication 02.11.2016
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Year of Publication 02.11.2016
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PROCESSING SYSTEM CONTAINING AN ISOLATION REGION SEPARATING A DEPOSITION CHAMBER FROM A TREATMENT CHAMBER
PONNEKANTI HARI K, ROCHA ALVAREZ JUAN CARLOS, SRIRAM MANDYAM, DUBOIS DALE R, JANAKIRAMAN KARTHIK, MALLICK ABHIJIT BASU, DEMOS ALEXANDROS T, SRINIVASAN MUKUND
Year of Publication 16.05.2016
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Year of Publication 16.05.2016
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로드락 통합된 베벨 에처 시스템
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Year of Publication 10.05.2018
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Year of Publication 10.05.2018
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METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSILE STRESS AT ELEVATED TEMPERATURES IN A PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM
ROCHA ALVAREZ JUAN CARLOS, KULSHRESHTHA PRASHANT KUMAR, PINSON JAY D. II, BALASUBRAMANIAN GANESH, ZHOU JIANHUA, PONNEKANTI HARI K, BEHERA SWAYAMBHU P, DUAN REN GUAN, LEE KWANGDUK DOUGLAS, FOSTER JASON K, HANAWA HIROJI, LIN XING, KIM BOK HOEN, HALLER UWE P, YE ZHENG JOHN, HA SUNGWON, SRINIVASAN MUKUND
Year of Publication 18.04.2017
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Year of Publication 18.04.2017
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ADVANCED PLATFORM FOR PASSIVATING CRYSTALLINE SILICON SOLAR CELLS
PONNEKANTI HARI K, BUSCHBECK WOLFGANG, POLYAK ALEXANDER S, LOPP ANDREAS, COX MICHAEL S, HAMMOND EDWARD P. IV, SCHLAEFER SUSANNE, MUNGEKAR HEMANT P, LANE CHRISTOPHER T, L'HEUREUX JAMES, HENRICH JUERGEN
Year of Publication 01.10.2014
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Year of Publication 01.10.2014
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ELECTROSTATIC CHUCK ASSEMBLY
PONNEKANTI HARI K, ROY SHAMBHU N, TSAI CHENG HSIUNG, SANSONI STEVEN V, PARKHE VIJAY D, BROWN KARL M
Year of Publication 12.05.2011
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Year of Publication 12.05.2011
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METHOD AND APPARATUS FOR REMOTE PLASMA SOURCE ASSISTED SILICON-CONTAINING FILM DEPOSITION
PONNEKANTI HARI K, TSO ALAN, FANG JUN, SHIEH BRIAN SY YUAN, HO DUSTIN W, CHO TOM, LAKSHMANAN ANNAMALAI, TANG JIANSHE, YUAN ZHENG, EBERSPACHER CHRIS, SCHMITT FRANCIMAR
Year of Publication 28.05.2013
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Year of Publication 28.05.2013
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Semiconductor process equipment
Rocha, Juan Carlos, Srinivasan, Mukund, Ponnekanti, Hari K, Janakiraman, Karthik
Year of Publication 04.08.2020
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Year of Publication 04.08.2020
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