Search Results - "POLYAK, T. A" :: K.UTB vyhledávací portál

Quality of life and survival: The role of multidimensional symptom assessment

by CHANG, V. T, THALER, H. T, POLYAK, T. A, KORNBLITH, A. B, LEPORE, J. M, PORTENOY, R. K
Published in Cancer (01.07.1998)

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Temporal atomic layer deposition processing chamber

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 01.10.2021

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Patent

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Apparatus for prevention of backside deposition in a spatial ald process chamber

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 01.08.2021

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공기 처리 디바이스

by TOTH ZOLTAN, POLYAK TIBOR, OLAH TIBOR
Year of Publication 01.07.2024

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Patent

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Non-metallic thermal cvd/ald gas injector and purge system

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 11.02.2021

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Patent

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정확한 챔버 매칭 및 프로세스 제어를 위한 페디스털 지지체 설계

by POLYAK ALEXANDER S, BALUJA SANJEEV, KRISHNA GOPU
Year of Publication 28.04.2023

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Patent

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In-situ wafer rotation for carousel processing chambers

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 01.12.2019

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Patent

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Device to increase deposition uniformity in spatial ald processing chamber

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 11.09.2019

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Patent

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TEMPORAL ATOMIC LAYER DEPOSITION PROCESSING CHAMBER

by POLYAK ALEXANDER S, YUDOVSKY JOSEPH
Year of Publication 23.07.2019

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Patent

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시간적 원자 층 증착 프로세싱 챔버

by POLYAK ALEXANDER S, YUDOVSKY JOSEPH
Year of Publication 03.07.2019

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Patent

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Pedestal support design for precise chamber matching and process control

by POLYAK, ALEXANDER S, KRISHNA, GOPU, BALUJA, SANJEEV
Year of Publication 01.08.2022

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Patent

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Device to increase deposition uniformity in spatial ALD processing chamber

by POLYAK ALEXANDER S, YUDOVSKY JOSEPH
Year of Publication 08.03.2019

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Patent

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공간적 ALD 프로세싱 챔버에서 증착 균일성을 증가시키기 위한 디바이스

by POLYAK ALEXANDER S, YUDOVSKY JOSEPH
Year of Publication 15.02.2019

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Patent

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APPARATUS FOR PREVENTION OF BACKSIDE DEPOSITION IN A SPATIAL ALD PROCESS CHAMBER

by POLYAK ALEXANDER S, YUDOVSKY JOSEPH
Year of Publication 21.12.2018

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Patent

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공간적 ALD 프로세스 챔버에서 배면 증착을 방지하기 위한 장치

by POLYAK ALEXANDER S, YUDOVSKY JOSEPH
Year of Publication 05.12.2018

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Patent

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Temporal atomic layer deposition processing chamber

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 01.08.2018

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Patent

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Device to increase deposition uniformity in spatial ALD processing chamber

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 01.04.2018

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Patent

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Digital microfluidic devices, systems, and methods for performing plasma particle assisted enzyme-linked immunosorbent assay self-detection

by POLYAK MICHAEL, ARJUN. SUDARSHAN, HARISH. KRISHNA KUMAR, DENOMME LYNN
Year of Publication 04.04.2023

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Patent

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Apparatus for prevention of backside deposition in a spatial ALD process chamber

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 01.03.2018

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Patent

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Non-metallic thermal CVD/ALD gas injector and purge system

by POLYAK, ALEXANDER S, YUDOVSKY, JOSEPH
Year of Publication 01.10.2017

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Patent

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