ROTARY DISK RECTOR HAVING FERROMAGNETIC FLUID SEAL FOR CHEMICAL DEPOSITION
RICHARD A COMUNALE, POLLOCK JOHN D, ROBERT WHITE MILGATE III, ROGER P FREMGEN, TODD A LUSE, LOUISE S BARRISS, ALEXANDER I GURARY
Year of Publication 29.09.2016
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Year of Publication 29.09.2016
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ROTATING DISK REACTOR WITH FERROFLUID SEAL FOR CHEMICAL VAPOR DEPOSITION
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A, MILGATE III ROBERT WHITE
Year of Publication 02.03.2016
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Year of Publication 02.03.2016
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Rotating disk reactor with ferrofluid seal for chemical vapor deposition
Luse, Todd A, Comunale, Richard A, Milgate, Robert White, Fremgen, Roger P, Barriss, Louise S, Pollock, John D, Gurary, Alexander I
Year of Publication 21.07.2020
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Year of Publication 21.07.2020
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