Roll-to-roll sputtering of indium tin oxide layers onto ultrathin flexible glass
Fahland, Matthias, Zywitzki, Olaf, Modes, Thomas, Vondkar, Komal, Werner, Torsten, Ottermann, Clemens, Berendt, Markus, Pollack, Gerd
Published in Thin solid films (01.01.2019)
Published in Thin solid films (01.01.2019)
Get full text
Journal Article
Transportmittel und Vakuumbeschichtungsanlage für Substrate unterschiedlicher Größe
STRUEMPFEL, JOHANNES.NAT, KLOOS, MATTHIAS, WOLF, ANDREJ, POLLACK, GERD
Year of Publication 31.05.2012
Get full text
Year of Publication 31.05.2012
Patent
Anordnung zur Beschichtung von Substraten
STEUER, CHRISTOPH, SENS, MARTIN, KRALAPP, UWE, HUMMEL, HENDRIK, UHLEMANN, AIKO, FABER, JOERG, POLLACK, GERD, BARTH, SVEN
Year of Publication 06.02.2014
Get full text
Year of Publication 06.02.2014
Patent
Arrangement for coating the substrates, comprises coating source and substrate support in vacuum chamber, where coating source is arranged to the support on one-side and the support has rear side pointing towards the coating source
STEUER, CHRISTOPH, SENS, MARTIN, KRALAPP, UWE, HUMMEL, HENDRIK, UHLEMANN, AIKO, FABER, JOERG, POLLACK, GERD, BARTH, SVEN
Year of Publication 05.01.2011
Get full text
Year of Publication 05.01.2011
Patent
Arrangement for vacuum coating of substrate, has transport support element and substrate support element arranged on substrate holder, and bars which are arranged between substrate support element and transport support element
STEUER, CHRISTOPH, SENS, MARTIN, DSAAK, TORSTEN, KILIAN, MICHAEL, KRALAPP, UWE, HUMMEL, HENDRIK, MOSSHAMMER, STEFFEN, OBST, HENRIK, UHLEMANN, AIKO, FABER, JOERG, POLLACK, GERD, BARTH, SVEN
Year of Publication 19.01.2012
Get full text
Year of Publication 19.01.2012
Patent
VORRICHTUNG ZUR TROCKNERATMOSPHAEREMESSUNG UND ZUR PROBEENTNAHME
KECKE,JUERGEN,DD, PALITZSCH,GERT,DD, SCHMIDT,CLAUS-MICHAEL,DD, POLLACK,GERD,DD
Year of Publication 25.01.1989
Get full text
Year of Publication 25.01.1989
Patent