Verfahren zur Substratschadensreduzierung bei PECVD
KONECNI, ANTHONY JOSEPH, GREWAL, VIRINDER SINGH, FORSTER, JOHN CURT, COTE, DONNA RIZZONE, PODLESNIKAGAN VALENTIN
Year of Publication 24.02.2000
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Year of Publication 24.02.2000
Patent
Process for reducing substrate damage during PECVD
KONECNI, ANTHONY JOSEPH, GREWAL, VIRINDER SINGH, FORSTER, JOHN CURT, COTE, DONNA RIZZONE, PODLESNIKAGAN VALENTIN
Year of Publication 04.08.1999
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Year of Publication 04.08.1999
Patent
Process for reducing substrate damage during PECVD
KONECNI, ANTHONY JOSEPH, GREWAL, VIRINDER SINGH, FORSTER, JOHN CURT, COTE, DONNA RIZZONE, PODLESNIKAGAN VALENTIN
Year of Publication 25.06.1997
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Year of Publication 25.06.1997
Patent