Method for controlling plasma in semiconductor fabrication
Liao, Si-Wen, Liu, Ding-I, Leu, Po-Hsiung, Kung, Hsiang-Sheng, Wu, Cheng-Tsung
Year of Publication 15.12.2020
Get full text
Year of Publication 15.12.2020
Patent
Method and system for controlling plasma in semiconductor fabrication
Liao, Si-Wen, Liu, Ding-I, Leu, Po-Hsiung, Kung, Hsiang-Sheng, Wu, Cheng-Tsung
Year of Publication 27.08.2019
Get full text
Year of Publication 27.08.2019
Patent
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
LIN, Chun-Li, LI, Yi-Fang, LEU, Po-Hsiung, LIU, Ding-I, WU, Chun-Sheng
Year of Publication 25.06.2020
Get full text
Year of Publication 25.06.2020
Patent
METHOD FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION
WU, Cheng-Tsung, LIAO, Si-Wen, LEU, Po-Hsiung, LIU, Ding-I, KUNG, Hsiang-Sheng
Year of Publication 12.12.2019
Get full text
Year of Publication 12.12.2019
Patent
Deposition device structure
Koai, Keith Kuang-Kuo, Lo, Yen-Chan, Lai, Yi-Fang, Hsu, Kai-Shiung, Sun, Chin-Feng, Chen, Huan-Chieh, Liu, Ding-I, Leu, Po-Hsiung
Year of Publication 21.04.2020
Get full text
Year of Publication 21.04.2020
Patent
Semiconductor Device Having a Shallow Trench Isolation Structure and Methods of Forming The Same
Chang, Geng-Shuoh, Wu, Chun-Sheng, Lin, Chun-Li, Li, Yi-Fang, Liu, Ding-I, Leu, Po-Hsiung
Year of Publication 23.08.2018
Get full text
Year of Publication 23.08.2018
Patent
Thermal chemical vapor deposition system and operating method thereof
Hsieh, Jheng-Uei, Lo, Yen-Chan, Liao, Si-Wen, Lai, Yi-Fang, Hsu, Kai-Shiung, Lin, Shian-Huei, Liu, Ding-I, Hsu, Jui-Fu, Leu, Po-Hsiung, Wu, Cheng-Tsung
Year of Publication 28.07.2020
Get full text
Year of Publication 28.07.2020
Patent
Semiconductor device having a shallow trench isolation structure and methods of forming the same
Chang, Geng-Shuoh, Wu, Chun-Sheng, Lin, Chun-Li, Li, Yi-Fang, Liu, Ding-I, Leu, Po-Hsiung
Year of Publication 24.04.2018
Get full text
Year of Publication 24.04.2018
Patent
DEPOSITION DEVICE STRUCTURE
SUN, Chin-Feng, CHEN, Huan-Chieh, LEU, Po-Hsiung, LIU, Ding-I, LO, Yen-Chan, LAI, Yi-Fang, HSU, Kai-Shiung, KOAI, Keith Kuang-Kuo
Year of Publication 31.01.2019
Get full text
Year of Publication 31.01.2019
Patent
COATING APPARATUS AND METHOD OF FORMING COATING FILM
LIN Mao-Cheng, LIAO Si-Wen, LIU Ding-I, LEU Po-Hsiung, YANG Yong-Hung, WANG Lan-Hai
Year of Publication 08.06.2017
Get full text
Year of Publication 08.06.2017
Patent
High density plasma reactor with multiple top coils
Lo Chi-Ching, Leu Po-Hsiung, Chuang Ho-Ta, Lin Tzu-Chun, Liu Ding-I, Chang Jen-Chi
Year of Publication 28.03.2017
Get full text
Year of Publication 28.03.2017
Patent