Search Results - "PLUG REINDER T" :: K.UTB vyhledávací portál

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METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE

by DILLEN HERMANUS ADRIANUS, PLUG REINDER T
Year of Publication 22.10.2021

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Integrated post-exposure bake track

by BARTRAY PETRUS R, AUER-JONGEPIER SUZAN L, LUTTIKHUIS BERNARDUS A. J, SEGERS HUBERT M, ONVLEE JOHANNES, PLUG REINDER T
Year of Publication 28.01.2014

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Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate

by DEN BOEF ARIE J, PLUG REINDER T, VAN DER MAST KAREL D
Year of Publication 06.12.2007

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Lithographic system, sensor, and method of measuring properties of a substrate

by DUSA MIRCEA, DEN BOEF ARIE J, CORBEIJ WILHELMUS M, PLUG REINDER T
Year of Publication 09.08.2007

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Integrated post-exposure bake track

by BARTRAY PETRUS R, AUER-JONGEPIER SUZAN L, LUTTIKHUIS BERNARDUS A. J, SEGERS HUBERT M, ONVLEE JOHANNES, PLUG REINDER T
Year of Publication 11.12.2008

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INTEGRATED POST-EXPOSURE BAKE TRACK

by BARTRAY PETRUS R, SEGERS HUBERT M, ONVLEE JOHANNES, AUER JONGEPIER SUZAN L, LUTTIKHUIS BERNARDUS A.J, PLUG REINDER T
Year of Publication 10.12.2008

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Servo control method and its application in a lithographic apparatus

by COX HARRY H. H. M, PLUG REINDER T
Year of Publication 16.07.2002

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Servo control method and its application in a lithographic apparatus

by Cox, Harry H. H. M, Plug, Reinder T
Year of Publication 16.07.2002

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Integrated post-exposure bake track

by AUER-JONGEPIER, SUZAN L, SEGERS, HUBERT M, ONVLEE, JOHANNES, BARTRAY, PETRUS R, LUTTIKHUIS, BERNARDUS A. J, PLUG, REINDER T
Year of Publication 21.10.2014

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Integrated post-exposure bake track

by BARTRAY PETRUS R, AUER-JONGEPIER SUZAN L, LUTTIKHUIS BERNARDUS A. J, SEGERS HUBERT M, ONVLEE JOHANNES, PLUG REINDER T
Year of Publication 08.05.2013

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Integrated post-exposure bake track

by BARTRAY PETRUS R, LUTTIKHUIS BERNARDUS A. J, SEGERS HUBERT M, ONVLEE JOHANNES, AUER JONGEPIER SUZAN L, PLUG REINDER T
Year of Publication 26.12.2012

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Integrated post-exposure bake track

by BARTRAY PETRUS R, LUTTIKHUIS BERNARDUS A. J, SEGERS HUBERT M, ONVLEE JOHANNES, AUER JONGEPIER SUZAN L, PLUG REINDER T
Year of Publication 29.09.2010

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Integrated post-exposure bake track

by AUER-JONGEPIER, SUZAN L, SEGERS, HUBERT M, ONVLEE, JOHANNES, BARTRAY, PETRUS R, PLUG, REINDER T, LUTTIKHUIS, BERNARDUS A.J
Year of Publication 01.02.2009

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