MICROMECHANICAL ACCELEROMETER
ZOTOV S.A, TIMOSHENKOV S.P, SHILOV V.F, RUBCHITS V.G, TIKHONOV V.A, MAKSIMOV V.N, CHAPLYGIN JU.A, KALUGIN V.V, LAPENKO V.N, PLEKHANOV V.E
Year of Publication 10.05.2005
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Year of Publication 10.05.2005
Patent
MICROMECHANICAL VIBRATORY GYROSCOPE AND METHOD OF ITS MANUFACTURE
ZOTOV S.A, SHILOV V.F, TIMOSHENKOV S.P, RUBCHITS V.G, TIKHONOV V.A, MAKSIMOV V.N, KALUGIN V.V, LAPENKO V.N, PLEKHANOV V.E
Year of Publication 20.03.2005
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Year of Publication 20.03.2005
Patent