다중 바이어스 전극을 가지는 이온 소스
SILVERSTEIN PAUL, FARLEY MARVIN, PLATOW WILHELM, BASSOM NEIL, SPORLEDER DAVID
Year of Publication 16.01.2024
Get full text
Year of Publication 16.01.2024
Patent
개선된 차폐부를 갖는 계단형 간접 가열 캐소드
SILVERSTEIN PAUL, FARLEY MARVIN, PLATOW WILHELM, BASSOM NEIL, SATOH SHU
Year of Publication 20.02.2023
Get full text
Year of Publication 20.02.2023
Patent
Neutron radiation due to high energy boron ion beams
Platow, Wilhelm, Rubin, Leonard, Mayfield, Patrick, Lessard, Ron, Whalen, Paul, Roberge, Steven
Published in MRS advances (01.12.2022)
Published in MRS advances (01.12.2022)
Get full text
Journal Article
Purion XEmax, Axcelis ultra-high energy implanter with Boost™ technology
Satoh, Shu, Platow, Wilhelm, Kondratenko, Serguei, Rubin, Leonard, Mayfield, Patrick, Lessard, Ron, Bonacorsi, Genise, Jen, Causon, Whalen, Paul, Newman, Russ
Published in MRS advances (01.12.2022)
Published in MRS advances (01.12.2022)
Get full text
Journal Article
이온 소스용 사극관 추출 장치
VANDERBERG BO, PLATOW WILHELM, BASSOM NEIL, ABESHAUS JOSHUA, EISNER EDWARD, CRISTOFORO MICHAEL
Year of Publication 26.08.2021
Get full text
Year of Publication 26.08.2021
Patent
METHOD FOR ION IMPLANTATION
CAI GARY N, WAN ZHIMIN, PLATOW WILHELM P, LI CHING I, SAADATMAND KOUROSH, LIN GER PIN, PADMANABHA REKHA
Year of Publication 06.01.2016
Get full text
Year of Publication 06.01.2016
Patent