Use of silicon containing imaging layer to define sub-resolution gate structures
PLAT MARINA V, LYONS CHRISTOPHER F, BELL SCOTT A, SINGH BHANWAR, SUBRAMANIAN RAMKUMAR
Year of Publication 18.03.2003
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Year of Publication 18.03.2003
Patent
Use of silicon containing imaging layer to define sub-resolution gate structures
Plat, Marina V, Bell, Scott A, Lyons, Christopher F, Subramanian, Ramkumar, Singh, Bhanwar
Year of Publication 18.03.2003
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Year of Publication 18.03.2003
Patent
Method of making a memory cell with polished insulator layer
PLAT MARINA V, PHAM TUAN DUC, OGLE ROBERT B, RAMSBEY MARK T, SHEN LEWIS, HSIAO TOMMY C, HUI ANGELA T
Year of Publication 15.03.2005
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Year of Publication 15.03.2005
Patent
Method of making a memory cell with polished insulator layer
Ramsbey, Mark T, Ogle, Robert B, Hsiao, Tommy C, Hui, Angela T, Pham, Tuan Duc, Plat, Marina V, Shen, Lewis
Year of Publication 15.03.2005
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Year of Publication 15.03.2005
Patent
Bright field image reversal for contact hole patterning
LYONS, CHRISTOPHER F, SUBRAMANIAN, RAMKUMAR, PLAT, MARINA V, LUKANC, TODD P
Year of Publication 01.02.2003
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Year of Publication 01.02.2003
Patent
DUAL DAMASCENE USING REMOVABLE VIA STUDS
SUBRAMANIAN, RAMKUMAR, BELL, SCOTT, A, LYONS, CHRISTOPHER, F, PLAT, MARINA, V, LUKANC, TODD, P
Year of Publication 14.11.2002
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Year of Publication 14.11.2002
Patent
Dual damascene using removable via studs
LUCKANC TODD P, PLAT MARINA V, LYONS CHRISTOPHER F, BELL SCOTT A, SUBRAMANIAN RAMKUMAR
Year of Publication 07.11.2002
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Year of Publication 07.11.2002
Patent
ENHANCED TRANSISTOR GATE USING E-BEAM RADIATION
YANG, CHIH-YUH, CALLAHAN, RUSSELL, R., A, FISHER, PHILIP, A, KHATHURIA, ASHOK, M, PLAT, MARINA, V
Year of Publication 03.10.2002
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Year of Publication 03.10.2002
Patent
Dark field image reversal for gate or line patterning
Lyons, Christopher F, Subramanian, Ramkumar, Plat, Marina V, Lukanc, Todd P
Year of Publication 10.09.2002
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Year of Publication 10.09.2002
Patent
Dark field image reversal for gate or line patterning
PLAT MARINA V, LYONS CHRISTOPHER F, LUKANC TODD P, SUBRAMANIAN RAMKUMAR
Year of Publication 10.09.2002
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Year of Publication 10.09.2002
Patent
BRIGHT FIELD IMAGE REVERSAL FOR CONTACT HOLE PATTERNING
SUBRAMANIAN, RAMKUMAR, LYONS, CHRISTOPHER, F, PLAT, MARINA, V, LUKANC, TODD, P
Year of Publication 29.08.2002
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Year of Publication 29.08.2002
Patent
Ultra-thin resist coating quality by increasing surface roughness of the substrate
Plat, Marina V, Lyons, Christopher F, Templeton, Michael K, Singh, Bhanwar
Year of Publication 23.07.2002
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Year of Publication 23.07.2002
Patent
Ultra-thin resist coating quality by increasing surface roughness of the substrate
PLAT MARINA V, LYONS CHRISTOPHER F, SINGH BHANWAR, TEMPLETON MICHAEL K
Year of Publication 23.07.2002
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Year of Publication 23.07.2002
Patent
Bright field image reversal for contact hole patterning
MARINA V. PLAT, CHRISTOPHER F. LYONS, RAMKUMAR SUBRAMANIAN, TODD P. LUKANC
Year of Publication 03.06.2002
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Year of Publication 03.06.2002
Patent
BRIGHT FIELD IMAGE REVERSAL FOR CONTACT HOLE PATTERNING
SUBRAMANIAN, RAMKUMAR, LYONS, CHRISTOPHER, F, PLAT, MARINA, V, LUKANC, TODD, P
Year of Publication 30.05.2002
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Year of Publication 30.05.2002
Patent
Dual damascene process utilizing a bi-layer imaging layer
PLAT MARINA V, LYONS CHRISTOPHER F, BELL SCOTT A, SUBRAMANIAN RAMKUMAR
Year of Publication 23.05.2002
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Year of Publication 23.05.2002
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