유체 핸들링 시스템 및 리소그래피 장치
STEFFENS KOEN, PIETERSE GERBEN, FAHRNI FRANCIS, POLET THEODORUS WILHELMUS, VAN DER HAM RONALD, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA
Year of Publication 09.05.2022
Get full text
Year of Publication 09.05.2022
Patent
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
JACOBS JOHANNES, STEFFENS KOEN, PIETERSE GERBEN, SIMONS WILHELMUS, LAFARRE RAYMOND, POLET THEODORUS, OVERKAMP JIM, VY VAN VUONG, HOUBEN MARTIJN, LEMPENS HAN, BLOKS RUUD, CORTIE ROGIER, TROMP SIEGFRIED, LAURENT THIBAULT
Year of Publication 20.05.2019
Get full text
Year of Publication 20.05.2019
Patent
A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC APPARATUS
BOUMAN WILLEM JAN, ROPS CORNELIUS MARIA, STEFFENS KOEN, PIETERSE GERBEN, MODDERMAN THEODORUS MARINUS, BASELMANS JOHANNES JACOBUS MATHEUS, SMEETS BART, POLET THEODORUS WILHELMUS, VAN DER HAM RONALD
Year of Publication 08.03.2017
Get full text
Year of Publication 08.03.2017
Patent
LITHOGRAPHIC APPARATUS METHOD OF TRANSFERRING A SUBSTRATE AND DEVICE MANUFACTURING METHOD
OLIESLAGERS RUUD, ROPS CORNELIUS MARIA, PIETERSE GERBEN, VAN DEN EIJNDEN PEPIJN, ALBERTI JOZEF AUGUSTINUS MARIA, SEGERS HUBERT MARIE, WILLEMS BAS, FAHRNI FRANCIS, VAN DONGEN PAUL, VAN BEUZEKOM AART ADRIANUS, VAN DER HAM RONALD
Year of Publication 10.02.2017
Get full text
Year of Publication 10.02.2017
Patent
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
JACOBS JOHANNES, STEFFENS KOEN, PIETERSE GERBEN, SIMONS WILHELMUS, LAFARRE RAYMOND, POLET THEODORUS, OVERKAMP JIM, VY VAN VUONG, HOUBEN MARTIJN, LEMPENS HAN, BLOKS RUUD, CORTIE ROGIER, TROMP SIEGFRIED, LAURENT THIBAULT
Year of Publication 07.11.2016
Get full text
Year of Publication 07.11.2016
Patent
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
PIETERSE GERBEN, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, CORCORAN GREGORY MARTIN MASON, JACOBS JOHANNES HENRICUS WILHELMUS, GUNTER PIETER LEIN JOSEPH, HOUBEN MARTIJN, THOMAS IVO ADAM JOHANNES, REMIE MARINUS JAN, LAURENT THIBAULT SIMON MATHIEU, DERKS SANDER CATHARINA REINIER, VERSPAGET COEN CORNELIS WILHELMUS, VAN DER HAM RONALD, KUNNEN JOHAN GERTRUDIS CORNELIS
Year of Publication 15.07.2015
Get full text
Year of Publication 15.07.2015
Patent
Fluid handling system and lithographic apparatus
Eummelen, Erik Henricus Egidius Catharina, Fahrni, Francis, Steffens, Koen, Van Der Ham, Ronald, Polet, Theodorus Wilhelmus, Pieterse, Gerben
Year of Publication 27.08.2024
Get full text
Year of Publication 27.08.2024
Patent
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
POLET, Theodorus Wilhelmus, FAHRNI, Francis, VAN DER HAM, Ronald, PIETERSE, Gerben, STEFFENS, Koen, EUMMELEN, Erik Henricus Egidius Catharina
Year of Publication 13.06.2024
Get full text
Year of Publication 13.06.2024
Patent
GAS MANIFOLD, MODULE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
VAN BOXTEL FRANK JOHANNES JACOBUS, VAN DAM MARINUS JOHANNES MARIA, PIETERSE GERBEN, VAN DER STEEN ANTONIUS ARNOLDUS HENRICUS, JASPER JOHANNES CHRISTIAAN MARIA, BARAGONA MARCO, VAN DER HAM RONALD, SHULEPOV SERGEI, DEBRAUWER PIETER
Year of Publication 27.04.2012
Get full text
Year of Publication 27.04.2012
Patent
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
PIETERSE GERBEN, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, CORCORAN GREGORY MARTIN MASON, JACOBS JOHANNES HENRICUS WILHELMUS, GUNTER PIETER LEIN JOSEPH, HOUBEN MARTIJN, THOMAS IVO ADAM JOHANNES, REMIE MARINUS JAN, LAURENT THIBAULT SIMON MATHIEU, DERKS SANDER CATHARINA REINIER, VERSPAGET COEN CORNELIS WILHELMUS, VAN DER HAM RONALD, KUNNEN JOHAN GERTRUDIS CORNELIS
Year of Publication 27.02.2013
Get full text
Year of Publication 27.02.2013
Patent
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
FAHRNI, Francis, POLET, Theodorus, Wilhelmus, EUMMELEN, Erik, Henricus, Egidius, Catharina, VAN DER HAM, Ronald, PIETERSE, Gerben, STEFFENS, Koen
Year of Publication 20.07.2022
Get full text
Year of Publication 20.07.2022
Patent
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
POLET, Theodorus, FAHRNI, Francis, VAN DER HAM, Ronald, PIETERSE, Gerben, EUMMELEN, Erik, STEFFENS, Koen
Year of Publication 18.03.2021
Get full text
Year of Publication 18.03.2021
Patent
LITHOGRAPHIC APPARATUS WITH IMPROVED PATTERNING PERFORMANCE
LA TORRE, Federico, VAN BOKHOVEN, Laurentius Johannes Adrianus, FONSECA Junior, José Nilton, PIETERSE, Gerben, EUMMELEN, Erik Henricus Egidius Catharina, VAN BOXTEL, Frank Johannes Jacobus
Year of Publication 17.12.2020
Get full text
Year of Publication 17.12.2020
Patent