Formation of Silicided Hyper-Shallow p+/n- Junctions by Pulsed Laser Annealing
Pey, Kin L., Ong, K. K., Lee, P. S., Setiawan, Y., Wang, X.C., Wee, A.T.S., Lim, G.C.
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
Formation of Silicided Hyper-Shallow p+/n- Junctions by Pulsed Laser Annealing
Pey, Kin L., Ong, K. K., Lee, P. S., Setiawan, Y., Wang, X.C., Wee, A.T.S., Lim, G.C.
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
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Journal Article
Slot designs in wide metal lines
LEE TAE J, VIGAR DAVID, SEE ALEX, HSIA LIANG C, LIM YEOW K, PEY KIN L
Year of Publication 23.02.2006
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Year of Publication 23.02.2006
Patent
Formation of strained Si channel and Si1-xGex source/drain structures using laser annealing
ONG KUANG K, YEO YEE C, SAMUDRA GANESH, CHONG YUNG F, PEY KIN L, CHUI KING J
Year of Publication 08.02.2007
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Year of Publication 08.02.2007
Patent