Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
PETRARACA KEVIN SHAWN, CHAN KEVIN KOK, JAHNES CHRISTOPHER VINCENT, LUND JENNIFER LOUISE, SPEIDELL JAMES LOUIS, DALTON TIMOTHY JOSEPH, BUCHWALTER LEENA PAIVIKKI, ZIEGLER JAMES FRANCIS
Year of Publication 18.09.2012
Get full text
Year of Publication 18.09.2012
Patent
Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
Buchwalter, Leena Paivikki, Chan, Kevin Kok, Dalton, Timothy Joseph, Jahnes, Christopher Vincent, Lund, Jennifer Louise, Petraraca, Kevin Shawn, Speidell, James Louis, Ziegler, James Francis
Year of Publication 18.09.2012
Get full text
Year of Publication 18.09.2012
Patent