OPTICAL METROLOGY WITH SMALL ILLUMINATION SPOT SIZE
SHCHEGROV ANDREI V, SAPIENS NOAM, PETERLINZ KEVIN A, BUETTNER ALEXANDER, PURRUCKER KERSTIN
Year of Publication 23.07.2024
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Year of Publication 23.07.2024
Patent
Absorption, Adsorption, and Desorption Studies of the Oxygen/Rh(111) System Using O2, NO, and NO2
Peterlinz, Kevin A, Sibener, Steven J
Published in Journal of physical chemistry (1952) (01.03.1995)
Published in Journal of physical chemistry (1952) (01.03.1995)
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Journal Article
COMBINED X-RAY AND OPTICAL METROLOGY
BAKEMAN MICHAEL, SHCHEGROV ANDREI, DZIURA THADDEUS GERARD, PETERLINZ KEVIN
Year of Publication 15.11.2019
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Year of Publication 15.11.2019
Patent
후막들 및 고 종횡비 구조물들의 측정을 위한 방법들 및 시스템들
KRISHNAN SHANKAR, SAPIENS NOAM, WANG DAVID Y, BUETTNER ALEXANDER, PETERLINZ KEVIN A, PURRUCKER KERSTIN
Year of Publication 27.09.2019
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Year of Publication 27.09.2019
Patent
개선된 스폿 크기 능력을 갖는 단일 파장 엘립소메트리
KVAMME DAMON, WANG FUMING, SALCIN ESEN, PETERLINZ KEVIN, HENNIGAN DANIEL R, KWAK HIDONG, GREENBERG URI
Year of Publication 31.08.2018
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Year of Publication 31.08.2018
Patent
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
SHCHEGROV ANDREI V, BRADY GREGORY, PETERLINZ KEVIN, WANG DAVID Y, SHAUGHNESSY DERRICK, VELDMAN ANDREI, ROTTER LAWRENCE D
Year of Publication 05.04.2019
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Year of Publication 05.04.2019
Patent
COMBINED X-RAY AND OPTICAL METROLOGY
BAKEMAN MICHAEL, SHCHEGROV ANDREI, DZIURA THADDEUS GERARD, PETERLINZ KEVIN
Year of Publication 16.03.2016
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Year of Publication 16.03.2016
Patent
작은 조명 스팟 사이즈를 갖는 광학 계측
SHCHEGROV ANDREI V, SAPIENS NOAM, PETERLINZ KEVIN A, BUETTNER ALEXANDER, PURRUCKER KERSTIN
Year of Publication 16.01.2018
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Year of Publication 16.01.2018
Patent
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
SHCHEGROV ANDREI V, BRADY GREGORY, PETERLINZ KEVIN, WANG DAVID Y, SHAUGHNESSY DERRICK, VELDMAN ANDREI, ROTTER LAWRENCE D
Year of Publication 18.06.2014
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Year of Publication 18.06.2014
Patent
Optical metrology tool equipped with modulated illumination sources
Veldman, Andrei, Shaughnessy, Derrick A, Rotter, Lawrence D, Wang, David Y, Shchegrov, Andrei V, Brady, Gregory, Peterlinz, Kevin
Year of Publication 27.02.2024
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Year of Publication 27.02.2024
Patent
Methods and systems for measurement of thick films and high aspect ratio structures
Buettner, Alexander, Peterlinz, Kevin A, Wang, David Y, Purrucker, Kerstin, Sapiens, Noam, Krishnan, Shankar
Year of Publication 14.09.2021
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Year of Publication 14.09.2021
Patent
Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures
Buettner, Alexander, Peterlinz, Kevin A, Wang, David Y, Purrucker, Kerstin, Sapiens, Noam, Krishnan, Shankar
Year of Publication 10.09.2020
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Year of Publication 10.09.2020
Patent
METHODS AND SYSTEMS FOR MEASUREMENT OF THICK FILMS AND HIGH ASPECT RATIO STRUCTURES
PETERLINZ, Kevin A, KRISHNAN, Shankar, PURRUCKER, Kerstin, SAPIENS, Noam, WANG, David Y, BUETTNER, Alexander
Year of Publication 09.09.2020
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Year of Publication 09.09.2020
Patent