Low-via-resistance and low-cost PVD-TiZrN barrier for Cu/low-K interconnects
Chan, Yu-Chen, Peng, Chao-Hsien, Lee, Ming-Han, Yang, Shin-Yi, Yeh, Ching-Fu, Shue, Shau-Lin
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
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Conference Proceeding
Journal Article
Characteristics of DC Reactively Sputtered (Ti,Zr)N Thin Films as Diffusion Barriers for Cu Metallization
Kuo, Yu-Lin, Lee, Chiapyng, Lin, Jing-Cheng, Peng, Chao-Hsien, Chen, Li-Chien, Hsieh, Ching-Hua, Shue, Shau-Lin, Liang, Mong-Song, Daniels, Brian J., Huang, Cheng-Lin, Lai, Chih-Huang
Published in Electrochemical and solid-state letters (01.09.2003)
Published in Electrochemical and solid-state letters (01.09.2003)
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Journal Article
SEMICONDUCTOR DEVICE INCLUDING LINER STRUCTURE
Yeh, Ching-Fu, Chan, Yu-Chen, Li, Shu-Wei, Lu, Meng-Pei, Yang, Shin-Yi, Luo, Guanyu, PENG, Chao-Hsien, Lee, Ming-Han
Year of Publication 26.09.2024
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Year of Publication 26.09.2024
Patent
Semiconductor device including liner structure
Peng, Chao-Hsien, Yeh, Ching-Fu, Li, Andy, Chan, Yu-Chen, Lu, Meng-Pei, Yang, Shin-Yi, Luo, Guanyu, Lee, Ming-Han
Year of Publication 02.07.2024
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Year of Publication 02.07.2024
Patent
Growth of (Ti, Zr)N films on Si by DC reactive sputtering of TiZr in N2/Ar gas mixtures effect of flow ratio
KUO, Yu-Lin, CHIAPYNG LEE, LAID, Chih-Huang, LIN, Jing-Cheng, PENG, Chao-Hsien, CHEN, Li-Chien, HSIEH, Ching-Hua, SHUE, Shau-Lin, LIANG, Mong-Song, DANIELS, Brian J, HUANG, Cheng-Lin
Published in Journal of the Electrochemical Society (01.03.2004)
Published in Journal of the Electrochemical Society (01.03.2004)
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Journal Article
Growth of (Ti,Zr)N Films on Si by DC Reactive Sputtering of TiZr in N[sub 2]/Ar Gas Mixtures
Kuo, Yu-Lin, Lee, Chiapyng, Lin, Jing-Cheng, Peng, Chao-Hsien, Chen, Li-Chien, Hsieh, Ching-Hua, Shue, Shau-Lin, Liang, Mong-Song, Daniels, Brian J., Huang, Cheng-Lin, Lai, Chih-Huang
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
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Journal Article
SEMICONDUCTOR DEVICE INCLUDING LINER STRUCTURE
Peng, Chao-Hsien, Yeh, Ching-Fu, Li, Andy, Chan, Yu-Chen, Lu, Meng-Pei, Yang, Shin-Yi, Luo, Guanyu, Lee, Ming-Han
Year of Publication 30.12.2021
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Year of Publication 30.12.2021
Patent