MICROELECTROMECHANICAL RESONATOR
JOSEPH C DOLL, PAUL M HAGELIN, CHARLES I GROSJEAN, LUTZ MARKUS, ZHANG YI, PARTRIDGE AARON, TRUSHAL CHOKSHI, NICHOLAS MILLER, GINEL C HILL
Year of Publication 28.10.2021
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Year of Publication 28.10.2021
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Scalable optical cross-connect switch using micromachined mirrors
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Published in IEEE photonics technology letters (01.07.2000)
Published in IEEE photonics technology letters (01.07.2000)
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A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator
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Published in IEEE journal of solid-state circuits (01.01.2015)
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Optical raster-scanning displays based on surface-micromachined polysilicon mirrors
Hagelin, P.M., Solgaard, O.
Published in IEEE journal of selected topics in quantum electronics (01.01.1999)
Published in IEEE journal of selected topics in quantum electronics (01.01.1999)
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MEMS resonator with colocated temperature sensor
Hagelin, Paul M, Hill, Ginel C, Partridge, Aaron, Lutz, Markus, Berger, Renata Melamud, Grosjean, Charles I
Year of Publication 17.09.2024
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Year of Publication 17.09.2024
Patent