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Published in Journal of the American Chemical Society (24.07.2013)
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Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (12.10.2017)
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Year of Publication 25.01.2024
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PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
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Year of Publication 29.06.2022
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Year of Publication 29.06.2022
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PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, JOSHUA KAITZ, MICHAEL FINCH
Year of Publication 29.06.2022
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Year of Publication 29.06.2022
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PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
SUZANNE M. COLEY, SHINTARO YAMADA, JOSHUA KAITZ, MICHAEL FINCH, PAUL J. LABEAUME
Year of Publication 24.06.2022
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Year of Publication 24.06.2022
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PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
SUZANNE M. COLEY, SHINTARO YAMADA, JOSHUA KAITZ, MICHAEL FINCH, PAUL J. LABEAUME
Year of Publication 24.06.2022
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Year of Publication 24.06.2022
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AROMATIC UNDERLAYER
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Year of Publication 08.08.2022
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SILICON-CONTAINING UNDERLAYERS
SUZANNE M COLEY, YAMADA SHINTARO, PAUL J LABEAUME, CHARLOTTE A CUTLER, JAMES F CAMERON, LI CUI, DANIEL GREENE
Year of Publication 13.05.2021
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Year of Publication 13.05.2021
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METHOD USING SILICON-CONTAINING UNDERLAYERS
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, CHARLOTTE A CUTLER, WILLIAM WILLAMS, JAMES F CAMERON, LI CUI
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Year of Publication 24.12.2020
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AROMATIC UNDERLAYER
SUZANNE M COLEY, LIU SHENG, YAMADA SHINTARO, KE IOU-SHENG, ZHANG KEREN, PAUL J LABEAUME, CUI LI, JAMES F CAMERON, DANIEL GREENE
Year of Publication 04.11.2021
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Year of Publication 04.11.2021
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COATING COMPOSITION AND METHOD OF FORMING ELECTRONIC DEVICE
SUZANNE M COLEY, WANG DEYAN, LIU SHENG, YAMADA SHINTARO, KE IOU-SHENG, PAUL J LABEAUME, CUI LI, JAMES F CAMERON, KEREN ZHANG
Year of Publication 04.11.2021
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Year of Publication 04.11.2021
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SILICON-BASED HARDMASK
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, BHOOSHAN POPERE, KIARIE CECILIA W, LI CUI
Year of Publication 01.10.2020
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Year of Publication 01.10.2020
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