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Year of Publication 26.06.2018
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Year of Publication 26.06.2018
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Polymer comprising repeat units with photoacid-generating functionality and base-solubility-enhancing functionality, and associated photoresist composition and electronic device forming method
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Year of Publication 28.03.2017
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Year of Publication 28.03.2017
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SILICON-CONTAINING UNDERLAYERS
Cameron James F, Cui Li, Coley Suzanne M, Sullivan Christopher P, Li Mingqi, LaBeaume Paul J, Cutler Charlotte A, Yamada Shintaro, Ongayi Owendi
Year of Publication 01.03.2018
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Year of Publication 01.03.2018
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SILICON-CONTAINING UNDERLAYERS
Cameron James F, Cui Li, Coley Suzanne M, Sullivan Christopher P, Li Mingqi, LaBeaume Paul J, Cutler Charlotte A, Yamada Shintaro, Ongayi Owendi
Year of Publication 01.03.2018
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Year of Publication 01.03.2018
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Photoresist composition and associated method of forming an electronic device
Cameron James F, Coley Suzanne M, Kwok Amy M, Jain Vipul, LaBeaume Paul J, Thackeray James W, Valeri David A
Year of Publication 31.01.2017
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Year of Publication 31.01.2017
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Photoresist composition and associated method of forming an electronic device
Cameron James F, Coley Suzanne M, Kwok Amy M, Jain Vipul, LaBeaume Paul J, Thackeray James W, Valeri David A
Year of Publication 24.01.2017
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Year of Publication 24.01.2017
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ACID GENERATORS AND PHOTORESISTS COMPRISING SAME
THACKERAY JAMES W, JAIN VIPUL, SUNG JIN WUK, LABEAUME PAUL J, CAMERON JAMES F
Year of Publication 07.01.2016
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Year of Publication 07.01.2016
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Polymer comprising repeat units with photoacid-generating functionality and base-solubility-enhancing functionality, and associated photoresist composition and electronic device forming method
Cameron James F, Coley Suzanne M, Kwok Amy M, Jain Vipul, LaBeaume Paul J, Thackeray James W, Valeri David A
Year of Publication 27.12.2016
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Year of Publication 27.12.2016
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Silicon-containing underlayers
YAMADA, SHINTARO, CAMERON, JAMES F, GREENE, DANIEL, LABEAUME, PAUL J, CUI, LI, CUTLER, CHARLOTTE A, COLEY, SUZANNE M
Year of Publication 21.06.2021
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Year of Publication 21.06.2021
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POLYMER COMPRISING REPEAT UNITS WITH PHOTOACID-GENERATING FUNCTIONALITY AND BASE-SOLUBILITY-ENHANCING FUNCTIONALITY, AND ASSOCIATED PHOTORESIST COMPOSITION AND ELECTRONIC DEVICE FORMING METHOD
KWOK AMY M, VALERI DAVID A, THACKERAY JAMES W, JAIN VIPUL, COLEY SUZANNE M, LABEAUME PAUL J, CAMERON JAMES F
Year of Publication 14.04.2016
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Year of Publication 14.04.2016
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POLYMER COMPRISING REPEAT UNITS WITH PHOTOACID-GENERATING FUNCTIONALITY AND BASE-SOLUBILITY-ENHANCING FUNCTIONALITY, AND ASSOCIATED PHOTORESIST COMPOSITION AND ELECTRONIC DEVICE FORMING METHOD
KWOK AMY M, VALERI DAVID A, THACKERAY JAMES W, JAIN VIPUL, COLEY SUZANNE M, LABEAUME PAUL J, CAMERON JAMES F
Year of Publication 14.04.2016
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Year of Publication 14.04.2016
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PHOTORESIST COMPOSITION AND ASSOCIATED METHOD OF FORMING AN ELECTRONIC DEVICE
KWOK AMY M, VALERI DAVID A, THACKERAY JAMES W, JAIN VIPUL, COLEY SUZANNE M, LABEAUME PAUL J, CAMERON JAMES F
Year of Publication 14.04.2016
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Year of Publication 14.04.2016
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PHOTORESIST COMPOSITION AND ASSOCIATED METHOD OF FORMING AN ELECTRONIC DEVICE
KWOK AMY M, VALERI DAVID A, THACKERAY JAMES W, JAIN VIPUL, COLEY SUZANNE M, LABEAUME PAUL J, CAMERON JAMES F
Year of Publication 14.04.2016
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Year of Publication 14.04.2016
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RESIST UNDERLAYER COMPOSITIONS AND PATTERN FORMATION METHODS USING SUCH COMPOSITIONS
YAMADA, SHINTARO, KE, IOU-SHENG, ZHANG, KEREN, CAMERON, JAMES F, KAITZ, JOSHUA, LABEAUME, PAUL J, CUI, LI, COLEY, SUZANNE M
Year of Publication 01.04.2022
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Year of Publication 01.04.2022
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Acid generators and photoresists comprising same
THACKERAY JAMES W, JAIN VIPUL, SUNG JIN WUK, LABEAUME PAUL J, CAMERON JAMES F
Year of Publication 03.02.2015
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Year of Publication 03.02.2015
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Resist underlayer compositions and methods of forming patterns with such compositions
YAMADA, SHINTARO, YANG, KE, ZHANG, KEREN, CAMERON, JAMES F, KAITZ, JOSHUA, LABEAUME, PAUL J, CUI, LI, AQAD, EMAD
Year of Publication 11.03.2022
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Year of Publication 11.03.2022
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Coating compositions and methods of forming electronic devices
LIU SHENG, YAMADA SHINTARO, KE IOU-SHENG, ZHANG KEREN, CUI LI, COLEY SUZANNE M, LABEAUME PAUL J, DEYANG WANG, CAMERON JAMES F
Year of Publication 02.11.2021
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Year of Publication 02.11.2021
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