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Year of Publication 18.04.2019
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Silicon-based hardmask
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Year of Publication 22.01.2019
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SILICON-BASED HARDMASK
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Year of Publication 20.12.2018
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Year of Publication 14.06.2018
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Year of Publication 07.05.2020
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Photoactive compounds, photoresist compositions including the same, and pattern formation methods
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Year of Publication 16.01.2024
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