RESIST UNDERLAYER COMPOSITIONS AND PATTERN FORMATION METHODS USING SUCH COMPOSITIONS
SUZANNE M. COLEY, SHINTARO YAMADA, KAREN ZHANG, JOSHUA KAITZ, IOU SHENG KE, PAUL J. LABEAUME, LI CUI, JAMES F. CAMERON
Year of Publication 09.12.2020
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Year of Publication 09.12.2020
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RESIST UNDERLAYER COMPOSITIONS AND PATTERN FORMATION METHODS USING THOSE COMPOSITIONS
SUZANNE M COLEY, YAMADA SHINTARO, KE IOU-SHENG, PAUL J LABEAUME, ZHANG KEREN, CUI LI, JOSHUA KAITZ, JAMES F CAMERON
Year of Publication 10.12.2020
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Year of Publication 10.12.2020
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RESIST UNDERLAYER COMPOSITIONS AND METHODS OF FORMING PATTERNS WITH SUCH COMPOSITIONS
KE YANG, YAMADA SHINTARO, PAUL J LABEAUME, JOSHUA KAITZ, CUI LI, JAMES F CAMERON, KEREN ZHANG, EMAD AQAD
Year of Publication 12.11.2020
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Year of Publication 12.11.2020
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RESIST UNDERLAYER COMPOSITIONS AND METHODS OF FORMING PATTERNS WITH SUCH COMPOSITIONS
KE YANG, SHINTARO YAMADA, JOSHUA KAITZ, PAUL J. LABEAUME, KEREN ZHANG, LI CUI, JAMES F. CAMERON, EMAD AQAD
Year of Publication 09.11.2020
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Year of Publication 09.11.2020
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SILICON-CONTAINING UNDERLAYERS
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, KE IOU-SHENG, CHARLOTTE A CUTLER, JAMES F CAMERON, LI CUI
Year of Publication 05.11.2020
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Year of Publication 05.11.2020
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SILICON-CONTAINING UNDERLAYERS
SUZANNE M COLEY, YAMADA SHINTARO, PAUL J LABEAUME, CHARLOTTE A CUTLER, JAMES F CAMERON, LI CUI, DANIEL GREENE
Year of Publication 13.06.2019
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Year of Publication 13.06.2019
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AROMATIC UNDERLAYER
SUZANNE M COLEY, SHINTARO YAMADA, PAUL J LABEAUME, SHENG LIU, JAMES F CAMERON, IOU SHENG KE, KEREN ZHANG, LI CUI, DANIEL GREENE
Year of Publication 12.05.2020
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Year of Publication 12.05.2020
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AROMATIC UNDERLAYER
SUZANNE M COLEY, LIU SHENG, YAMADA SHINTARO, KE IOU-SHENG, ZHANG KEREN, PAUL J LABEAUME, CUI LI, JAMES F CAMERON, DANIEL GREENE
Year of Publication 07.05.2020
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Year of Publication 07.05.2020
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SILICON-CONTAINING UNDERLAYERS
SUZANNE M. COLEY, SHINTARO YAMADA, CHARLOTTE A. CUTLER, PAUL J. LABEAUME, LI CUI, DANIEL GREENE, JAMES F. CAMERON
Year of Publication 20.05.2019
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Year of Publication 20.05.2019
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PHOTOACID GENERATORS
PAUL J LABEAUME, ONGAYI OWENDI, THACKERAY JAMES W, JAIN VIPUL, COLEY SUZANNE M, AHMAD E MADKOUR, CAMERON JAMES F
Year of Publication 18.04.2019
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Year of Publication 18.04.2019
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SILICON-BASED HARD MASK
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, BHOOSHAN POPERE, KIARIE CECILIA W, LI CUI
Year of Publication 10.01.2019
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Year of Publication 10.01.2019
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SILICON-BASED HARDMASK
SUZANNE M. COLEY, SHINTARO YAMADA, CECILIA W. KIARIE, BHOOSHAN POPERE, PAUL J. LABEAUME, LI CUI
Year of Publication 24.12.2018
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Year of Publication 24.12.2018
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METHOD USING SILICON-CONTAINING UNDERLAYERS
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, CHARLOTTE A CUTLER, WILLIAM WILLAMS, JAMES F CAMERON, LI CUI
Year of Publication 26.07.2018
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Year of Publication 26.07.2018
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METHOD FOR USING SILICON-CONTAINING UNDERLAYER
PAUL J LABEAUME, YAMADA SHINTARO, CHARLOTTE A CUTLER, CUI LI, WILLIAM WILLAMS, JAMES F CAMERON
Year of Publication 05.07.2018
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Year of Publication 05.07.2018
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METHOD USING SILICON-CONTAINING UNDERLAYERS
SHINTARO YAMADA, CHARLOTTE A. CUTLER, WILLIAM WILLAMS, PAUL J. LABEAUME, LI CUI, JAMES F. CAMERON
Year of Publication 22.06.2018
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Year of Publication 22.06.2018
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METHOD USING SILICON-CONTAINING UNDERLAYERS
SUZANNE M. COLEY, SHINTARO YAMADA, CHARLOTTE A. CUTLER, WILLIAM WILLAMS, PAUL J. LABEAUME, LI CUI, JAMES F. CAMERON
Year of Publication 22.06.2018
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Year of Publication 22.06.2018
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SILICON-CONTAINING UNDERLAYERS
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, CHARLOTTE A CUTLER, OWENDI ONGAYI, LI MINGQI, JAMES F CAMERON, LI CUI, CHRISTOPHER P SULLIVAN
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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SILICON-CONTAINING UNDERLAYERS
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, CHARLOTTE A CUTLER, OWENDI ONGAYI, LI MINGQI, JAMES F CAMERON, LI CUI, CHRISTOPHER P SULLIVAN
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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SILICON-CONTAINING UNDERLAYER
SUZANNE M COLEY, PAUL J LABEAUME, YAMADA SHINTARO, KE IOU-SHENG, CHARLOTTE A CUTLER, JAMES F CAMERON, LI CUI
Year of Publication 28.02.2019
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Year of Publication 28.02.2019
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SILICON-CONTAINING UNDERLAYERS
SUZANNE M. COLEY, SHINTARO YAMADA, CHARLOTTE A. CUTLER, PAUL J. LABEAUME, IOU SHENG KE, LI CUI, JAMES F. CAMERON
Year of Publication 13.02.2019
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Year of Publication 13.02.2019
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