LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE PROCESSING CHAMBERS
SALINAS, Martin Jeffrey, DHAMODHARAN, Raja Murali, LAU, Shu-Kwan, PATIL, Aniketnitin
Year of Publication 20.06.2024
Get full text
Year of Publication 20.06.2024
Patent
LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE PROCESSING CHAMBERS
SALINAS, Martin Jeffrey, DHAMODHARAN, Raja Murali, LAU, Shu-Kwan, PATIL, Aniketnitin
Year of Publication 20.06.2024
Get full text
Year of Publication 20.06.2024
Patent
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCTURES FOR EPITAXIAL DEPOSITION OPERATIONS
SALINAS, Martin Jeffrey, MORADIAN, Ala, GHAZAL, Peydaye Saheli, DHAMODHARAN, Raja Murali, SUBBANNA, Manjunath, LAU, Shu-Kwan, PATIL, Aniketnitin, SANCHEZ, Errol Antonio C, ZHU, Zuoming
Year of Publication 18.01.2024
Get full text
Year of Publication 18.01.2024
Patent
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCTURES FOR EPITAXIAL DEPOSITION OPERATIONS
SALINAS, Martin Jeffrey, MORADIAN, Ala, GHAZAL, Peydaye Saheli, DHAMODHARAN, Raja Murali, SUBBANNA, Manjunath, LAU, Shu-Kwan, PATIL, Aniketnitin, SANCHEZ, Errol Antonio C, ZHU, Zuoming
Year of Publication 18.01.2024
Get full text
Year of Publication 18.01.2024
Patent
Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operations
DHAMODHARAN, RAJA MURALI, SALINAS, MARTIN JEFFREY, LAU, SHU-KWAN, PATIL, ANIKETNITIN, SANCHEZ, ERROL ANTONIO C, ZHU, ZUOMING, MORADIAN, ALA, SUBBANNA, MANJUNATH, GHAZAL, PEYDAYE SAHELI
Year of Publication 16.01.2024
Get full text
Year of Publication 16.01.2024
Patent