Deposition of Niobium Nitride Thin Films from Tert-Butylamido-Tris-(Diethylamido)-Niobium by a Modified Industrial MOCVD Reactor
Thiede, Tobias B., Parala, Harish, Reuter, Knud, Passing, Gerd, Kirchmeyer, Stephan, Hinz, Jörn, Lemberger, Martin, Bauer, Anton J., Barreca, Davide, Gasparotto, Alberto, Fischer, Roland A.
Published in Chemical vapor deposition (01.12.2009)
Published in Chemical vapor deposition (01.12.2009)
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Journal Article
Evaluation of MOCVD Grown Niobium Nitride Films as Gate Electrode for Advanced CMOS Technology
Thiede, Tobias, Parala, Harish, Reuter, Knud, Passing, Gerd, Kirchmeyer, Stephan, Hinz, Jörn, Lemberger, Martin, Bauer, Anton, Fischer, Roland
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Journal Article
PRODUCTION OF NONOXIDE MONOLITHIC CERAMIC SHAPED ARTICLES
RIEDEL, RALF, PANTOZZ, GILBERT, PASSING, GERD, BROOK, RICHARD J, COLOMBIER, CHRISTIAN, GONON, MAURICE
Year of Publication 18.03.1997
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Year of Publication 18.03.1997
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