EUV laser produced plasma source development
Farrar, Nigel R., Brandt, David C., Fomenkov, Igor V., Ershov, Alex I., Bowering, Norbert R., Partlo, William N., Myers, David W., Bykanov, Alexander N., Vaschenko, Georgiy O., Khodykin, Oleh V., Hoffman, Jerzy R., Chrobak, Christopher P.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
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Year of Publication 29.09.2016
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Year of Publication 10.12.2015
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FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, BOWERING NORBERT R, KHODYKIN OLEH V, BYKANOV ALEXANDER N, BRANDT DAVID C
Year of Publication 29.11.2016
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Year of Publication 29.11.2016
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Year of Publication 25.03.2014
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Year of Publication 25.03.2014
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Year of Publication 25.03.2014
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Year of Publication 25.03.2014
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OSCILLATOR-AMPLIFIER DRIVE LASER WITH SEED PROTECTION FOR AN EUV LIGHT SOURCE
FOMENKOV IGOR V, PARTLO WILLIAM N, SANDSTROM RICHARD L, BROWN DANIEL J. W, HOU KAI CHUNG
Year of Publication 26.12.2013
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Year of Publication 26.12.2013
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METHOD FOR LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS
FOMENKOV IGOR V, PARTLO WILLIAM N, BROWN DANIEL J.W, SANDSTROM RICHARD L
Year of Publication 23.12.2013
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Year of Publication 23.12.2013
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MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE
FOMENKOV IGOR V, PARTLO WILLIAM N, SANDSTROM RICHARD L, BROWN DANIEL J. W, HOU KAI CHUNG
Year of Publication 06.11.2013
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Year of Publication 06.11.2013
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, BOWERING NORBERT R, KHODYKIN OLEH V, BYKANOV ALEXANDER N, BRANDT DAVID C
Year of Publication 08.05.2015
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Year of Publication 08.05.2015
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SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE
FOMENKOV IGOR V, ERSHOV ALEXANDER I, PARTLO WILLIAM N, FLEUROV VLADIMIR B, BYKANOV ALEXANDER N, DE DEA SILVIA
Year of Publication 27.02.2014
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Year of Publication 27.02.2014
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METROLOGY FOR EXTREME ULTRAVIOLET LIGHT SOURCE
FOMENKOV IGOR V, PARTLO WILLIAM N, BERGSTEDT ROBERT N, SENEKERIMYAN VAHAN, KIM NAM HYONG
Year of Publication 20.09.2012
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Year of Publication 20.09.2012
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