Abnormally enhanced dielectric constant in ZrO2/Ta2O5 multi-laminate structures by metallic Ta formation
Cho, Hyunchol, Park, Kyung-Woong, Park, Cheol Hwan, Cho, Ho Jin, Yeom, Seung-Jin, Hong, Kwon, Kwak, Noh-Jung, Ahn, Ji-Hoon
Published in Materials letters (01.09.2015)
Published in Materials letters (01.09.2015)
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Journal Article
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
PARK CHEOL HWAN, SONG JAE HEE, PARK KYUNG WOONG, IM KI VIN, LEE DONG HYUN
Year of Publication 07.07.2023
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Year of Publication 07.07.2023
Patent