Micro-mechanical IC gyroscope for angular velocity sensing
PARK, KYU-YEON, TAEJON, KR, LEE, CHONG-WON, TAEJON, KR, SONG, CHI-MOO, SUNGNAM, KR, CHO, YUONG-HO, TAEJON, KR
Year of Publication 03.07.1997
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Year of Publication 03.07.1997
Patent