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Optimal Calibration for Rotating Analyzer Ellipsometer

Optimal Calibration for Rotating Analyzer Ellipsometer

by PARK, Sunglim, GWEON, Daegab
Published in Journal of mechanical science and technology (01.11.2005)

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Journal Article

Precision auto-alignment for incident angle of an ellipsometer using specimen stage

Precision auto-alignment for incident angle of an ellipsometer using specimen stage

by Park, Sunglim, Gweon, DaeGab, Kim, Young Dong
Published in Thin solid films (01.05.2004)

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Journal Article

Precision auto-alignment for incident angle of an ellipsometer using specimen stage

Precision auto-alignment for incident angle of an ellipsometer using specimen stage

by PARK, Sunglim, GWEON, Daegab, YOUNG DONG KIM
Published in Thin solid films (2004)

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