Microwave plasma generation by the fast rotation and slow pulsation of resonant fields in a cylindrical cavity
Hasegawa, Yuichi, Nakamura, Keiji, Lubomirsky, Dima, Park, Soonam, Kobayashi, Satoru, Sugai, Hideo
Published in Japanese Journal of Applied Physics (01.04.2017)
Published in Japanese Journal of Applied Physics (01.04.2017)
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Journal Article
Optimization of hollow cathode discharge electrode for damage free remote plasma removal process for semiconductor manufacturing
Cho, Tae S., Han, Qing, Yang, Dongqing, Park, Soonam, Lubomirsky, Dima, Venkataraman, Shankar
Published in Japanese Journal of Applied Physics (01.05.2016)
Published in Japanese Journal of Applied Physics (01.05.2016)
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Journal Article
Dual Discharge Modes Operation of an Argon Plasma Generated by Commercial Electronic Ballast for Remote Plasma Removal Process
Cho, Tae S., Yi-Heng Sen, Bokka, Ramesh, Park, Soonam, Lubomirsky, Dima, Venkataraman, Shankar
Published in IEEE transactions on plasma science (01.06.2014)
Published in IEEE transactions on plasma science (01.06.2014)
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Journal Article
Dual plasma modes operation of hollow cathode electrode system for remote plasma removals for semiconductor manufacturing
Cho, Tae S., Soonam Park, Lubomirsky, Dima, Venkataraman, Shankar
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
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Conference Proceeding
Influence of driving method on discharge mode of damage free remote plasma removal process for semiconductor manufacturing
Cho, Tae S., Qing Han, Soonam Park, Lubomirsky, Dima, Venkataraman, Shankar
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
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Conference Proceeding
CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
SINGH SARAVJEET, LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOKKEE, PARK SOONAM, KALITA LAKSHESWAR, KIM TAE WON
Year of Publication 06.11.2023
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Year of Publication 06.11.2023
Patent
CORROSION RESISTANT GROUND SHIELD OF PROCESSING CHAMBER
LUBOMIRSKY DMITRY, HE XIAO MING, WU XIAOWEI, PARK SOONAM, KALITA LAKSHESWAR, SUN JENNIFER Y
Year of Publication 25.07.2023
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Year of Publication 25.07.2023
Patent
SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED PRECURSOR FLOW
LUBOMIRSKY DMITRY, TAN TIEN FAK, PHAM PHONG, SUAREZ EDWIN C, PARK SOONAM, JUNG SOONWOOK, LU RAYMOND W
Year of Publication 28.04.2023
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Year of Publication 28.04.2023
Patent
SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW
LUBOMIRSKY DMITRY, INGLE NITIN, YANG DONGQING, HILLMAN PETER, SAMIR MEHMET TUGRUL, ZHU LALA, PARK SOONAM, CHOY MARTIN YUE
Year of Publication 24.04.2023
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Year of Publication 24.04.2023
Patent
RF RF TAILORED VOLTAGE ON BIAS OPERATION
KOBAYASHI SATORU, LUBOMIRSKY DMITRY, PARK SOONAM, TIAN WEI, RAUF SHAHID, KIM JUNGHOON
Year of Publication 08.03.2022
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Year of Publication 08.03.2022
Patent
전도성 전극들을 갖는 세라믹 샤워헤드들
SINGH SARAVJEET, LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOKKEE, PARK SOONAM, KALITA LAKSHESWAR, KIM TAE WON
Year of Publication 24.08.2021
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Year of Publication 24.08.2021
Patent
내장형 RF 차폐부를 갖는 반도체 기판 지지부들
LUBOMIRSKY DMITRY, CHO JAEYONG, GRACE MICHAEL, PARK SOONAM, KALNIN NIKOLAI, KALUARACHCHI DON CHANNA K, BENJAMINSON DAVID
Year of Publication 23.04.2021
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Year of Publication 23.04.2021
Patent
SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONENT PROTECTION
LUBOMIRSKY DMITRY, TAN TIEN FAK, LOH LOK KEE, PARK SOONAM, JUNG SOONWOOK, CHOY MARTIN YUE
Year of Publication 03.02.2021
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Year of Publication 03.02.2021
Patent
반도체 공정들 및 장비를 위한 자기 유도 플라즈마 소스
KOBAYASHI SATORU, LUBOMIRSKY DMITRY, PARK SOONAM, JUNG SOONWOOK, SCHATZ KENNETH D, CHO TAE SEUNG, KIM JUNGHOON
Year of Publication 14.10.2020
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Year of Publication 14.10.2020
Patent
처리 챔버의 내부식성 접지 차폐부
LUBOMIRSKY DMITRY, HE XIAO MING, WU XIAOWEI, PARK SOONAM, KALITA LAKSHESWAR, SUN JENNIFER Y
Year of Publication 12.07.2021
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Year of Publication 12.07.2021
Patent
바이어스 동작에 대한 RF 맞춤조정된 전압
KOBAYASHI SATORU, LUBOMIRSKY DMITRY, PARK SOONAM, TIAN WEI, RAUF SHAHID, KIM JUNGHOON
Year of Publication 24.06.2020
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Year of Publication 24.06.2020
Patent