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Published in Japanese Journal of Applied Physics (01.06.2019)
Published in Japanese Journal of Applied Physics (01.06.2019)
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Year of Publication 09.03.2023
Patent
Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective
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Published in Japanese Journal of Applied Physics (30.05.2019)
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Published in Japanese Journal of Applied Physics (30.05.2019)
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Published in 2023 International Electron Devices Meeting (IEDM) (09.12.2023)
Published in 2023 International Electron Devices Meeting (IEDM) (09.12.2023)
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Year of Publication 29.02.2024
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Year of Publication 29.02.2024
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Year of Publication 29.02.2024
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Year of Publication 01.02.2024
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METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE
KIM, Yonghwan, KIM, Yangdoo, SUH, Minkyu, PARK, Sangwuk, HONG, Jungpyo, LEE, Dokeun, LEE, Geonyeop
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
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