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Published in Review of scientific instruments (01.04.2019)
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Low temperature micro-photoluminescence spectroscopy of microstructures with InAsP/InP strained quantum wells
Landesman, J P, Isik-Goktas, N, LaPierre, R R, Levallois, C, Ghanad-Tavakoli, S, Pargon, E, Petit-Etienne, C, Jiménez, J
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Published in Journal of physics. D, Applied physics (04.11.2021)
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Analysis by HR-STEM of the Strain Generation in InP after SiNx Deposition and ICP Etching
Gutiérrez, M., Reyes, D. F., Araujo, D., Landesman, J. P., Pargon, E.
Published in Journal of electronic materials (01.09.2020)
Published in Journal of electronic materials (01.09.2020)
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Vacuum ultra violet absorption spectroscopy of 193 nm photoresists
Fouchier, M., Pargon, E., Azarnouche, L., Menguelti, K., Joubert, O., Cardolaccia, T., Bae, Y. C.
Published in Applied physics. A, Materials science & processing (01.11.2011)
Published in Applied physics. A, Materials science & processing (01.11.2011)
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Plasma etching of HfO2 in metal gate CMOS devices
SUNGAUER, E, MELLHAOUI, X, PARGON, E, JOUBERT, O
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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2D and 3D photoresist line roughness characterization
Vaglio Pret, Alessandro, Kunnen, Eddy, Gronheid, Roel, Pargon, Erwine, Luere, Olivier, Bianchi, Davide
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Characterisation of ultraviolet nanoimprint dedicated resists
Voisin, P., Zelsmann, M., Cluzel, R., Pargon, E., Gourgon, C., Boussey, J.
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Development of low-damage plasma etching processes for preserving AlGaN/GaN heterostructure integrity in MIS HEMT
Fesiienko, O., Petit-Etienne, C., Darnon, M., Soltani, A., Maher, H., Pargon, E.
Published in 2022 Compound Semiconductor Week (CSW) (01.06.2022)
Published in 2022 Compound Semiconductor Week (CSW) (01.06.2022)
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Nanometer scale linewidth control during etching of polysilicon gates in high-density plasmas
Joubert, O, Pargon, E, Foucher, J, Detter, X, Cunge, G, Vallier, L
Published in Microelectronic engineering (01.09.2003)
Published in Microelectronic engineering (01.09.2003)
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A Source of Heralded Single Photon Using High Quality Factor Silicon Ring Resonators
Sabattoli, F.A., Sciancalepore, C., Galli, M., Bajoni, D., Dirani, H. El, Garrisi, F., Sam, S., Petit-Etienne, C., Hartmann, J.M., Pargon, E., Monat, C., Liscidini, M.
Published in 2019 21st International Conference on Transparent Optical Networks (ICTON) (01.07.2019)
Published in 2019 21st International Conference on Transparent Optical Networks (ICTON) (01.07.2019)
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Low-Loss Silicon Technology for High-Q Bright Quantum Sources
Bajoni, D., Sabattoli, F. A., Sciancalepore, C., El Dirani, H., Galli, M., Garrisi, F., Hartmann, J. M., Liscidini, M., Monat, C., Pargon, E., Petit-Etienne, C.
Published in 2019 IEEE 16th International Conference on Group IV Photonics (GFP) (01.08.2019)
Published in 2019 IEEE 16th International Conference on Group IV Photonics (GFP) (01.08.2019)
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Conference Proceeding
Low-Loss Silicon Technology for High-Q Bright Quantum Sources
El Dirani, H., Bajoni, D., Sciancalepore, C., Sabattoli, F. A., Garrisi, F., Petit-Etienne, C., Hartmann, J. M., Pargon, E., Monat, C., Liscidini, M., Galli, M.
Published in 2019 IEEE 16th International Conference on Group IV Photonics (GFP) (01.08.2019)
Published in 2019 IEEE 16th International Conference on Group IV Photonics (GFP) (01.08.2019)
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Conference Proceeding
Extending thermal stability of short-living soliton states in silicon nitride microring resonators
Grassani, D., El Dirani, H., Sabattoli, F. A., Youssef, L., Petit-Etienne, C., Kerdiles, S., Pargon, E., Liscidini, M., Sciancalepore, C., Bajoni, D., Galli, M.
Published in Optics continuum (15.07.2022)
Published in Optics continuum (15.07.2022)
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Unconventional triple junction solar cells based on micro technologies
Darnon, Maxime, Volatier, Maite, Hamon, Gwenaelle, Albert, Pierre, de Lafontaine, Mathieu, Delannoy, Xavier Mackre, Richard, Olivier, Aimez, Vincent, Bechou, Laurent, Pargon, Erwine, Jaouad, Abdelatif
Published in 2020 47th IEEE Photovoltaic Specialists Conference (PVSC) (14.06.2020)
Published in 2020 47th IEEE Photovoltaic Specialists Conference (PVSC) (14.06.2020)
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Conference Proceeding
Plasma etching of HfO@@d2@ in metal gate CMOS devices
Sungauer, E, Mellhaoui, X, Pargon, E, Joubert, O
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Plasma etching of HfO 2 in metal gate CMOS devices
Sungauer, E., Mellhaoui, X., Pargon, E., Joubert, O.
Published in Microelectronic engineering (2009)
Published in Microelectronic engineering (2009)
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Synchronous Pulsed Plasma for Silicon Etch Applications
Darnon, Maxime, Petit-Etienne, Camille, Pargon, Erwine, Cunge, Gilles, Vallier, Laurent, Bodart, Paul, Haas, Moritz, Banna, Samer, Lill, Thorsten, Joubert, Olivier
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Generation of Photon Pairs in Linearly Uncoupled Resonators Employing a Reconfigurable Mach-Zehnder Interferometer
Gianini, L., Sabattoli, F. A., El Dirani, H., Youssef, L., Garrisi, F., Zatti, L., Petit-Etienne, C., Pargon, E., Liscidini, M., Sciancalepore, C., Bajoni, D., Galli, M.
Published in 2022 Conference on Lasers and Electro-Optics (CLEO) (01.05.2022)
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Published in 2022 Conference on Lasers and Electro-Optics (CLEO) (01.05.2022)
Conference Proceeding
A Reconfigurable Source of Entangled Frequency bins
Clementi, M., Sabattoli, F. A., El Dirani, H., Bergamasco, N., Gianini, L., Youssef, L., Petit-Etienne, C., Pargon, E., Liscidini, M., Sciancalepore, C., Galli, M., Bajoni, D.
Published in 2022 Conference on Lasers and Electro-Optics (CLEO) (01.05.2022)
Published in 2022 Conference on Lasers and Electro-Optics (CLEO) (01.05.2022)
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